Silicides for VLSI Applications

1st Edition

Authors: Shyam Murarka
Hardcover ISBN: 9780125112208
eBook ISBN: 9780080570563
Imprint: Academic Press
Published Date: 28th March 1983
Page Count: 200
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Description

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Readership

It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.

Table of Contents

Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.

Details

No. of pages:
200
Language:
English
Copyright:
© Academic Press 1983
Published:
Imprint:
Academic Press
eBook ISBN:
9780080570563
Hardcover ISBN:
9780125112208

About the Author

Shyam Murarka

Affiliations and Expertise

Bell Telephone Laboratories

Reviews

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.