Silicides for VLSI Applications
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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Readership
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.
Table of Contents
- Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
Product details
- No. of pages: 200
- Language: English
- Copyright: © Academic Press 2012
- Published: March 28, 1983
- Imprint: Academic Press
- eBook ISBN: 9780080570563
About the Author
Shyam Murarka
Affiliations and Expertise
Bell Telephone Laboratories
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