Silicides for VLSI Applications

Silicides for VLSI Applications

1st Edition - March 28, 1983

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  • Author: Shyam Murarka
  • eBook ISBN: 9780080570563

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Description

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Readership

It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.

Table of Contents

  • Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.

Product details

  • No. of pages: 200
  • Language: English
  • Copyright: © Academic Press 2012
  • Published: March 28, 1983
  • Imprint: Academic Press
  • eBook ISBN: 9780080570563

About the Author

Shyam Murarka

Affiliations and Expertise

Bell Telephone Laboratories

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