Semiconductor Safety Handbook

1st Edition

Safety and Health in the Semiconductor Industry

Authors: Richard A. Bolmen
Hardcover ISBN: 9780815514183
eBook ISBN: 9780815518990
Imprint: William Andrew
Published Date: 31st December 1998
Page Count: 634
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Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA).

The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken three years to complete and has involved tremendous effort and commitment by the authors.

They have attempted to construct a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment.

This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.


Semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.

Table of Contents

  1. Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies 1.0 Introduction 2.0 Review and Discussion of Semiconductor Industry Work Injuries and Illnesses 3.0 Review and Discussion of Epidemiologic Investigations 4.0 Conclusion References
  2. Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention 1.0 Introduction 2.0 External and Internal Sources Affecting Compliance 3.0 Detection of Environmental Compliance and Management Issues 4.0 Corrective Action for Environmental Compliance and Management Issues 5.0 Mitigation and Prevention of Environmental Compliance and Management Issues 6.0 Adopting Proactive Environmental Strategies 7.0 Going Beyond ComplianceùHolistic Considerations References and Source Materials Appendix A: Epa Policy on Environmental Auditing Appendix B: Environmental Compliance Audit Checklist
  3. Chemical Hazards in Semiconductor Operations Overview 1.0 Photolithography 2.0 Wet Etch 3.0 Dry Etch 4.0 Implant/Diffusion 5.0 Cleaning 6.0 Metallization 7.0 Maintenance Issues 8.0 Use of Gases
  4. Industrial Hygiene 1.0 Introduction 2.0 Industrial Hygiene Monitoring 3.0 Personal Protective Equipment 4.0 Odor Identification 5.0 Recordkeeping Acknowledgments References
  5. Electrical Hazards 1.0 Introduction 2.0 Where Do We Start? 3.0 Terminology 4.0 Human Effects 5.0 Scenario of an Electrical Shock 6.0


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© William Andrew 1998
William Andrew
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About the Author

Richard A. Bolmen

Affiliations and Expertise

Aon Risk Services, USA