Semiconductor Industrial Hygiene Handbook

Semiconductor Industrial Hygiene Handbook

Monitoring, Ventiliation, Equipment and Ergonomics

1st Edition - December 31, 1995

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  • Authors: David G. Baldwin, Paul C. Manz, Michael E. Williams
  • eBook ISBN: 9780815518976

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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.


Industrial hygienists and safety engineers in the semiconductor industry

Table of Contents

  • 1. Introduction
    1.0 Foreword
    2.0 Overview of Book
    3.0 Background
    2. Industrial Hygiene Monitoring
    1.0 Overview of IH Monitoring
    2.0 Assessment Tools
    3.0 Biomonitoring: Urinary Arsenic Testing
    4.0 Chemical Agents
    3. Industrial Hygiene Monitoring: Physical Agents
    1.0 Noise
    2.0 Non-Ionizing Radiation
    3.0 Ionizing Radiation
    4. Ventilation
    1.0 Background
    2.0 Types
    3.0 Monitoring
    4.0 Guidelines/Standards
    5. Personal Protective Equipment (PPE)
    1.0 Background
    2.0 Chemical Protective Gloves
    3.0 Respiratory Protection
    6. Indoor Air Quality (IAQ)
    1.0 Recognition of IAQ Problems
    2.0 Odor Identification
    3.0 Causative Agents
    4.0 Evaluation of IAQ Problems
    5.0 Generally Recognized Acceptable Levels
    6.0 Industrial Hygiene IAQ Monitoring Equipment
    7.0 Prevention of IAQ Problems
    8.0 Records
    7. Ergonomics
    1.0 Background
    2.0 Identification and Evaluation of Physical Stressors
    3.0 Stressful Postures Associated with CTD'S
    4.0 Semiconductor Ergonomic/Material Handling Exposures
    5.0 Ergonomic Design and Layout Principles
    6.0 Semiconductor Equipment
    7.0 Summary
    8. Industrial Hygiene Recordkeeping
    1.0 General
    2.0 Continuous Monitor Records
    3.0 Ventilation Records
    4.0 Employee Communication
    5.0 Personnel Records
    9. Plan Review
    1.0 Overview
    Appendix A: Silicon Ingot and Wafer Manufacturing
    Appendix B: Silicon Device Manufacturing Introduction
    Appendix C: III-V (GaAs)
    Appendix D: III-V Device: Microwave IC
    Appendix E: Ion Implanter Maintenance Safety Considerations
    Appendix F: Bibliography
    Glossary and Acronyms

Product details

  • No. of pages: 363
  • Language: English
  • Copyright: © William Andrew 1995
  • Published: December 31, 1995
  • Imprint: William Andrew
  • eBook ISBN: 9780815518976

About the Authors

David G. Baldwin

Affiliations and Expertise

Apple Computer, Inc.

Paul C. Manz

Affiliations and Expertise

Hewlett-Packard, USA

Michael E. Williams

Affiliations and Expertise

Amry Research Laboratory, Monmouth, NY, USA

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