Semiconductor gas sensors have a wide range of applications in safety, process control, environmental monitoring, indoor or cabin air quality and medical diagnosis. This important book summarises recent research on basic principles, new materials and emerging technologies in this essential field.

The first part of the book reviews the underlying principles and sensing mechanisms for n- and p-type oxide semiconductors, introduces the theory for nanosize materials and describes the role of electrode–semiconductor interfaces. The second part of the book describes recent developments in silicon carbide- and graphene-based gas sensors, wide bandgap semiconductor gas sensors and micromachined and direct thermoelectric gas sensors. Part 3 discusses the use of nanomaterials for gas sensing, including metal oxide nanostructures, quantum dots, single-alled carbon nanotubes and porous silicon. The final part of the book surveys key applications in environmental monitoring, detecting chemical warfare agents and monitoring gases such as carbon dioxide.

Semiconductor gas sensors is a valuable reference work for all those involved in gas monitoring, including those in the building industry, environmental engineers, defence and security specialists and researchers in this field.

Key Features

  • Provides an overview of resistor and non-resistor sensors
  • Reviews developments in gas sensors and sensing methods, including graphene based sensors and direct thermoelectric sensors
  • Discusses the use of nanomaterials in gas sensing


Industrial scientists, academic professionals, national lab scientists and students who are working in the field of chemical and biochemical sensor research and development

Table of Contents

Contributor contact details

Woodhead Publishing Series in Electronic and Optical Materials

Part I: Introduction

Chapter 1: Fundamentals of semiconductor gas sensors


1.1 Introduction

1.2 Classification of semiconductor gas sensors

1.3 Resistor type sensors: empirical aspects

1.4 Resistor type sensors: theoretical aspects

1.5 Non-resistive sensors

1.6 Future trends

Chapter 2: Conduction mechanism in semiconducting metal oxide sensing films: impact on transduction


2.1 Introduction

2.2 General discussion about sensing with semiconducting metal oxide gas sensors

2.3 Sensing and transduction for p- and n-type semiconducting metal oxides

2.4 Investigation of the conduction mechanism in semiconducting metal oxide sensing layers: studies in working conditions

2.5 Conclusion and future trends

Chapter 3: Electrode materials and electrode-oxide interfaces in semiconductor gas sensors


3.1 Introduction

3.2 Electrode materials for semiconductor gas sensors

3.3 Electrode-oxide semiconductor interfaces

3.4 Charge carrier transport in the electrode-oxide semiconductor interfaces

3.5 Gas/solid interactions in the electrode-oxide semiconductor interfaces

3.6 Conclusion

Part II: Advanced sensing methods and structures

Chapter 4: Recent trends in silicon carbide (SiC) and graphene-based gas sensors


4.1 Introduction

4.2 Background: transduction and sensing mechanisms

4.3 Recent material developments for improved selectivity of SiC gas sensors

4.4 Dynamic sensor operation

4.5 Novel SiC and graphene-based sensor devices

4.6 Conclusion

Chapter 5: Recent advances in wide bandgap semiconductor-based gas sensors


5.1 Introduction

5.2 Gas sensi


No. of pages:
© 2013
Woodhead Publishing
Print ISBN:
Electronic ISBN:

About the editors

Raivo Jaaniso

Raivo Jaaniso is a Senior Scientist in the Institute of Physics, University of Tartu, Estonia.

Ooi Kiang Tan

Ooi Kiang Tan is Professor of Microelectronics in the School of Electrical and Electronic Engineering, Nanyang Technical University, Singapore.