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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing - 1st Edition - ISBN: 9780125330268, 9780080542928

PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing, Volume 26

1st Edition

Serial Editors: Stephen Rossnagel Ronald Powell Abraham Ulman
Hardcover ISBN: 9780125330268
eBook ISBN: 9780080542928
Imprint: Academic Press
Published Date: 23rd October 1998
Page Count: 419
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Table of Contents

Useful Conversion Factors and Constants. Introduction. Physics of Sputtering. Plasma Systems. The Planar Magnetron. Sputtering Tools. Directional Deposition. Planarized PVD: Use of Elevated Temperature and/or High Pressure. Ionized Magnetron Sputter Deposition. PVD Materials and Processes. Process Modeling for Magnetron Deposition. Sputtering Targets. Index.


Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.
In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.

This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.


Thin film and surface science researchers in chemistry, materials science, electrical engineering, biology, and condensed matter physics


No. of pages:
© Academic Press 1999
23rd October 1998
Academic Press
Hardcover ISBN:
eBook ISBN:

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About the Serial Editors

Stephen Rossnagel

Affiliations and Expertise

IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York, U.S.A.

Ronald Powell

Affiliations and Expertise

Novellus Systems, Inc., Palo Alto, California

Abraham Ulman

Affiliations and Expertise

Polytechnic University, Brooklyn, New York, U.S.A.