Principles of Vapor Deposition of Thin Films

1st Edition

Authors: Professor K.S. Sree Harsha
Hardcover ISBN: 9780080446998
eBook ISBN: 9780080480312
Imprint: Elsevier Science
Published Date: 16th December 2005
Page Count: 1176
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The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.

Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.

Key Features

  • Offers detailed derivation of important formulae.
  • Thoroughly covers the basic principles of materials science that are important to any thin film preparation.
  • Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.


Graduate students interested in entering electronics materials industry and other thin film device technology areas. Students in materials and electronic engineering. Professionals in the materials science industry.


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© Elsevier Science 2005
Elsevier Science
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About the Author

Professor K.S. Sree Harsha

Affiliations and Expertise

Emeritus Professor of Materials Engineering, San Jose State University, San Jose.