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Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.
1 Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing
II. Plasma-Induced Optical Emission
III. Absorption Spectroscopy
IV. Laser Techniques
V. Optical Techniques for Plasma-Surface Interactions
2 Plasma Diagnostics in Electric Discharge Light Sources
II. Diagnostic Techniques Employed
III. Summary and Conclusions
3 How Langmuir Probes Work
II. Interpretation of Semi-Infinite Planar Langmuir Probe Data
III. Effects of Finite Probe Size and Shape
IV. Effects of Ion-Neutral Collisions
V. Probes in Magnetic Fields
VI. Secondary Electron Effects
VII. Emissive Probes
VIII. Probe Perturbations
IX. Fluctuating Plasma Potentials
X. Probe Contamination
XI. Langmuir Probe Circuits
XII. Direct Electron Temperature Measurements
XIII. Directional Probe
4 Mass Spectrometry of Plasmas
II. Plasma Flux Analysis
III. Partial Pressure Analysis
IV. Flux Analysis of Plasmas: Energy Selection and Mass Filtering
V. Mass Filtering
VI. Flux Analysis: Neutral Species
VII. Experimental Considerations and Applications: Flux Analysis of Plasmas
VIII. Experimental Considerations and Applications: Partial Pressure Analysis
5 Microwave Diagnostics
II. How to Get Started: A Simple Microwave Diagnostics Apparatus
III. Cavity and Waveguide Diagnostic Techniques
IV. Interferometric Techniques
V. Microwave Scattering and Radiometry
VI. Plasma Waves and Their Applications in Microwave Diagnostics
6 Paramagnetic Resonance as a Plasma Discharge Diagnostic
II. Basic Theory
7 Diagnostics in Thermal Plasma Processing
II. Methods for Production and Characterization of Plasmas
III. Specific Problems Related to Measurements under Thermal Plasma Conditions
IV. Plasma Flow Diagnostics
V. Measurements of Particle Parameters in Thermal Plasmas
- No. of pages:
- © Academic Press 1989
- 28th February 1989
- Academic Press
- eBook ISBN:
Microelectronics Center of North Carolina and North Carolina University
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