Plasma Deposition, Treatment, and Etching of Polymers

Plasma Deposition, Treatment, and Etching of Polymers

The Treatment and Etching of Polymers

1st Edition - October 28, 1990

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  • Editor: Riccardo d'Agostino
  • eBook ISBN: 9780323139083

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Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, including their use as coatings for chemical fibers and films. Additional applications include uses for the passivation of metals, the surface hardening of tools, increased biocompatibility of biomedical materials, chemical and physical sensors, and a variety of micro- and optoelectronic devices.

Key Features

  • Appeals to a broad range of industries from microelectronics to space technology
  • Discusses a wide array of new uses for plasma polymers
  • Provides a tutorial introduction to the field
  • Surveys various classes of plasma polymers, their chemical and morphological properties, effects of plasma process parameters on the growth and structure of these synthetic materials, and techniques for characterization
  • Interests scientists, engineers, and students alike


Scientists, technicians, and engineers in industry, academia, and at national laboratories; graduate students of electrical engineering and materials science

Table of Contents

  • N. Morosoff, An Introduction to Plasma Polymerization. R. d'Agostino, F. Cramarossa, F. Fracassi, and F. Illuzzi, Plasma Polymerization of Fluorocarbons. A.M. Wrobel and M.R. Wertheimer, Plasma-Polymerized Organosilicones and Organometallics. H. Biederman and L. Martinu, Plasma Polymer-Metal Composite Films. F.D. Egitto, V. Vukanovic, and G.N. Taylor, Plasma Etching of Organic Polymers. S. Morita and S. Hattori, Applications of Plasma Polymers. B.D. Ratner, A. Chilkoti, and G.P. Lopez, Plasma Deposition and Treatment for Biomaterial Applications. Index.

Product details

  • No. of pages: 544
  • Language: English
  • Copyright: © Academic Press 1990
  • Published: October 28, 1990
  • Imprint: Academic Press
  • eBook ISBN: 9780323139083

About the Editor

Riccardo d'Agostino

Affiliations and Expertise

Centro di Studio per la Chimica dei Plasmi, CNR, University of Bari

About the Series Editors

Daniel Flamm

Affiliations and Expertise

AT&T Bell Laboratories, Murray Hill, New Jersey

Orlando Auciello

Affiliations and Expertise

Microelectronics Center of North Carolina and North Carolina University

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