Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.
@introbul:Key Features @bul:* Focuses on the plasma chemistry of amorphous silicon-based materials
- Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced
- Features an international group of contributors
- Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
The audience includes plasma physicists, electrical engineers, materials scientists, plasma chemists, and condensed matter physicists in industry and academia.
- No. of pages:
- © Academic Press 1995
- 25th September 1995
- Academic Press
- eBook ISBN:
- Hardcover ISBN:
@qu:"The book...provides a very useful outline of the underlying properties, processes as well as their applications." @source:--VACUUM
Centro di Studio per la Chimica dei Plasmi, CNR
MV Systems, Inc.