Mechanic and Dielectric Properties

Contributors

Preface

Deposition and Mechanical Properties of Superlattice Thin Films

I. Introduction

II. Deposition Techniques

III. Characterization

A. X-Ray Diffraction

B. Transmission Electron Microscopy

C. Other Techniques

IV. Deposition Mechanisms, Structure, and Stability

A. Crystal Structure and Lattice Relaxation

B. Nucleation and Layer Morphology

C. Interdiffusion

D. Summary

V. Mechanical Property Measurements

A. Elastic Moduli and Constants

B. Hardness and Yield Strength

VI. Elastic Properties

A. Experimental Results

B. Theoretical Predictions

VII. Mechanical Strength and Hardness

A. Experimental Results

B. Theoretical Predictions

C. Comparison of Experiment and Theory

VIII. Conclusions

Acknowledgments

References

Hard Coatings Prepared by Sputtering and Arc Evaporation

I. Introduction

II. Deposition Techniques Based on Sputtering and Evaporation

A. Effect of Particle Bombardment in Film Deposition Process

B. Sputtering

C. Evaporation

D. Comparison of Reactive Magnetron Sputtering and Arc Evaporation Techniques

III. Hard Coatings

A. Physical Properties of Hard Materials

B. Substrate/Coating Interface

C. Bulk of the Coating Material

D. Upper Layer of the Coating

E. Multilayer and Gradient Coatings

IV. Growth and Properties of Hard Coatings

A. Chemical Composition

B. Phase Composition

C. Structure Zone Models

D. Microstructure of TiN Films Grown under Ion Bombardment

E. Crystalline Structure and Stress

F. Preferred Orientation

G. Surface Morphology

H. Correlation Process/Microstructure/Properties

V. Deposition Process

A. Substrate Heating

B. Surface Etching and Interface Formation

C. Film Deposition

D. Coating Uniformity

VI. Concluding Remarks

References

Thin Films in Microwave Acoustics

I. Introduction

II. Thin Film Materials — Growth and Characterization

A. General Requirements

B. Piezoelectric and Ferroelectric Films

C. Other Film Materials

III. Surface Wave Device Structures

A. Basic Device Principles and Technology Survey

B. SAW Attenuation in Thin Ferromagnetic Films

C. Integrated Device Structures

D. SAW-ACT

IV. Bulk Wave Device Structures

A. General Background

B. Delay Lines

C. High-Overtone Bulk Acoustic Resonators (HBAR)

D. Film Bulk-Wave Acoustic Resonator (FBAR)

V. Emerging Technology

A. Thin-Film Materials Issues

B. Acoustic Sensors

C. Other Emerging Applications

VI. Conclusions

References

Ferroelectric Films for Integrated Electronics

I. Introduction and Background

II. Ferroelectric Film Materials

A. Properties and Applications of Interest

B. Film Deposition—General

III. Growth and Applications—Examples

A. PbTiO3 and Solid Solutions

B. LiNbO3, LiTaO3, KNbO3, and KTaO3

C. Bismuth Titanate, Bi4Ti3O12

D. Polymers and Inorganic Fluorides

E. Other Materials

IV. Integrated Electronics Issues

A. Materials Processing

B. Interface and Stability Effects

C. Integrated Device Structures

V. Conclusions

Acknowledgments

References

Electrochromic Tungsten-Oxide-Based Thin Films: Physics, Chemistry, and Technology

I. Introduction

II. Comments on W Oxide Bulk Crystals

III. As-deposited Films: Structure and Composition

A. Evaporated Films

B. Sputter-deposited Films

C. Films Made by Chemical and Electrochemical Techniques

IV. Ion Intercalated Films: Electrochemical Characterization

A. Diffusion Constants

B. Electromotive Force

C. Chronoamperometry

D. Cyclic Voltammetry

E. Impedance Spectrometry

F. Beam Deflectometry

V. Ion Intercalated Films: Physical Characterization

A. Microbalance Studies

B. Depth Profiling of Intercalated Species

C. Electron- and X-ray Extinction

D. Vibrational Spectroscopy

E. Magnetic Resonance

F. X-ray Photoelectron Spectroscopy

VI. Optical Properties

A. Semiconductor Bandgaps

B. As-deposited Films: Luminous and Near-infrared Properties

C. Survey of Coloration Methods

D. Ion Intercalated Films: Luminous and Near-infrared Properties

E. Theoretical Models

VII. Device Data

A. Liquid Electrolyte

B. Solid Inorganic Bulk-type Ion Conductor

C. Solid Inorganic Thin Film Ion Conductor

D. Polymer Electrolyte

VIII. Summary and Conclusions

References

Author Index

Subject Index