Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.
Researchers in the semiconductor industry; professors and advanced undergraduate and graduate-level students in materials science, electrical engineering, physics, and chemistry.
Preface. Glossary of Acronyms Used in the Text. Notation for Organometallic Precursor Molecules. Overview of the OMVPE Process. Source Molecules. Thermodynamics. Kinetics. Hydrodynamics and Mass Transport. Design of the OMVPE Process. Specific Materials. Superlattice Structures. Devices. Each chapter includes references. Index.
- No. of pages:
- © Academic Press 1989
- 28th July 1989
- Academic Press
- eBook ISBN:
Stringfellow was among the pioneers of the organometallic vapor phase epitaxial (OMVPE) growth technique, beginning his work in this area in 1975. He has published over 150 papers on this subject and delivered 30 invited papers at national and international conferences during the last 5 years. This work emphasizes the materials science aspects of OMVPE growth, including the thermodynamic and kinetic aspects of the process, the development of new source materials, and the growth of metastable alloys. The first epitaxial layers of InAsSb in the range of solid immiscibility. InPSb, GaPSb, GaInPSb, GaInAsSb, InAsBi, InSbBi, and InAsSbBi, inside the miscibility gap, were produced in Stringfellow’s group. The growth of immiscible alloys has led to the discovery of atomic scale ordering in many III/V alloys. He and his students recently demonstrated the control of domain size in these ordered materials by using grooves photolithographically produced on the (001) surface. This had resulted in the largest ordered domains ever produced in semiconductor materials. Current research focuses on the ordering mechanism, particularly the effects of surface structure on ordering.Other important work is involved with the development of new procedures for OMVPE. He and his students pioneered the now widely-used tertiarybutylarsine and tertiarybutylphosphine. They also used several other precursors for the first time, including: ethyldimethylindium, triisopropylantimony, triallylantimony, trivinylantimony, and tertiarybutyldimethylantimony.
University of Utah, Salt Lake City, U.S.A.
@qu:This book, written by a true expert in the field of growing semiconductors, provides an up-to-date summary of the current state of understanding of the principles, the problems as well as the latest developments in organometallic vapor-phase epitaxy (OMVPE)...this book should be exceedingly useful to anyone interested in OMVPE and is a welcome addition to the library. The author must be complimented for sharing his knowledge and understanding of the OMVPE process with the scientific community. @source:--JOURNAL OF THE AMERICAN CHEMICAL SOCIETY @qu:This book, written by one of the major contributors to OMVPE, definitely shows that it should be treated like a Science even if it is performed by artists...After a short historical introduction, the first part deals with the organometallic molecules which are used or could be used in OMVPE...The second part is the heart of the book. The author takes us step by step into the complicated epitaxial process which is controlled by Thermodynamics, Kinetics, Hydrodynamics, and Mass transport...The third part is a review of the achievements of OMVPE in terms of materials, microstructures, and devices. This is an excellent book which will benefit both the achievements of OMVPE in terms of materials, microstructures, and devices...This is an excellent book which will benefit both the experienced OMVPE crystal grower (as a reference book) and the newcomer (as an educational tool)....This book contains a wealth of information. @source:--PHYSICS IN CANADA @qu:I highly recommend this text as a primary reference...Stringfellow's OMVPE: Theory and Practice is one of the first'good books' in this field. @source:--MRS BULLETIN