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Micromanufacturing Engineering and Technology - 2nd Edition - ISBN: 9780323311496, 9780323312677

Micromanufacturing Engineering and Technology

2nd Edition

Editor: Yi Qin
Hardcover ISBN: 9780323311496
eBook ISBN: 9780323312677
Imprint: William Andrew
Published Date: 8th May 2015
Page Count: 858
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Table of Contents

  • Author Biographies
  • Chapter 1. Overview of Micro-manufacturing
    • Introduction
    • Products and market
    • Meeting manufacturing requirements and adding values
    • Micro-manufacturing methods and processes
    • Manufacturing systems/equipment for micro-manufacturing
    • Design considerations and material factors
    • Development and utilization strategies of micro-manufacturing technologies
  • Chapter 2. Micro-/Nano-machining through Mechanical Cutting
    • Introduction
    • Fundamentals of the micro-/nano-cutting process
    • Modeling the micro-/nano-cutting process
    • Precision machines for micro-/nano-cutting
    • Micro-tooling
    • Applications
    • Competitive technologies and economic considerations
  • Chapter 3. FIB Micro-/Nano-fabrication
    • Introduction
    • Architecture of FIB
    • Ion column
    • Electron column
    • Stage
    • Imaging detectors
    • Gas injection system
    • Pumping system
    • Energy dispersive spectroscopy
    • Residual gas analyzer
    • Electron backscatter diffraction
    • Manipulator
    • FIB processes
    • FIB milling
    • Mode of energy loss
    • Sputtering process
    • FIB deposition
    • FIB imaging
    • FIB etching process
    • Scanning strategies
    • Patterning strategies
    • Applications of FIB
    • 3-D micro-/nano-structuring
    • Circuit editing and failure analysis
    • TEM/STEM sample preparation
    • FIB as an analytical technique
    • Summary: issues and future of FIB
  • Chapter 4. Micro-electrical Discharge Machining
    • Introduction
    • Working principle
    • Process
    • Machinery
    • Applications
  • Chapter 5. Laser Micro-structuring
    • Introduction
    • Basic properties of laser ablation
    • Process principles for laser ablation
    • Examples
    • Conclusions
  • Chapter 6. Micro-electrochemical Machining
    • Introduction
    • Working principles
    • Mechanism of the anodic dissolution
    • Polarization curves and Pourbaix diagrams
    • Basic calculations in ECM and/or micro-ECM process
    • Electrolytes
    • IEG control and modeling
    • Equipment for micro-ECM
    • Applications and examples
  • Chapter 7. Hot Embossing
    • Introduction
    • Hot embossing process
    • Process variations
    • Materials for hot embossing
    • Hot embossing techniques
    • Hot embossing tools
    • Applications
    • The outlook
  • Chapter 8. Forming of Polymeric Tubular Micro-components
    • Introduction
    • Principle
    • Materials
    • Forming tools and machines
    • Applications
  • Chapter 9. Micro-injection Molding
    • Introduction
    • μIM scenario
    • μIM technology
    • Process control and analysis
    • Defects of micro-injection-molded parts: weld lines
    • Process simulation
    • Conclusions
  • Chapter 10. Net Shape Manufacture of Freestanding Ceramic Micro-components through Soft Lithography
    • Introduction
    • Process
    • Fabrication and characterization of the molds
    • Ceramic slurry preparation and control
    • Sintered micro-components
    • Conclusions
  • Chapter 11. Micro-sintering through a FAST Process
    • Introduction
    • Micro-FAST sintering process
    • Analysis of process
    • Applications of Micro-FAST
    • Conclusions
  • Chapter 12. Micro-bulk Forming
    • Introduction
    • Basic cold forming processes
    • The size effect
    • Workpiece materials
    • Tool materials
    • Machine and tool design
    • Micro-tribology
    • Process analysis
  • Chapter 13. Forming of Micro-sheet Metal Components
    • Introduction
    • Manufacturing processes and fundamentals
    • General considerations for manufacturing
    • Forming tools
    • Manufacturing presses/machines
    • Design considerations for micro-sheet metal parts for forming
    • Micro-sheet forming—a case study
    • Technological competitiveness and operational economics
  • Chapter 14. Micro-hydroforming
    • Introduction
    • Principle of hydroforming and process variants
    • Semifinished products and materials
    • Process chain for part production
    • Hydroforming process design
    • Design considerations and potential applications of micro-hydroforming
    • Tools and machines
    • Conclusions
  • Chapter 15. Laser-assisted Micro-forming
    • Introduction
    • System technology
    • Processes
    • Conclusions
  • Chapter 16. Deep X-ray Lithography
    • Introduction
    • LIGA process and strengths
    • Commercial application
    • Conclusions
  • Chapter 17. Polymer Thin Films—Processes, Parameters and Property Control
    • Introduction
    • Thin films obtained by extrusion coating
    • Organic coatings deposited in solution
    • Vacuum-deposited coatings
    • Conclusions
  • Chapter 18. Advanced Inkjet Technology for 3D Micro-metal Structure Fabrication
    • Introduction
    • Inkjet printing system
    • Materials (metal NP ink)
    • Inkjet printed 3D metal micro-structure
    • Applications/cases/cost issues
  • Chapter 19. Process Chains and Tooling Concepts
    • Introduction
    • Tooling concepts
    • Selection criteria for tooling process chains
    • Applications
    • Conclusions
  • Chapter 20. Surface Engineering and Micro-manufacturing
    • Introduction
    • Fundamentals of advanced surface engineering processes for tooling protection
    • Applications of surface engineering processes in micro-manufacturing
    • Summary
  • Chapter 21. DLC-Coated Tools for Micro-forming
    • Introduction
    • Characteristics and preparation of DLC film
    • DLC-coated tools in micro-sheet forming
    • DLC-coated tools in micro-bulk forming
    • DLC-coated tools in nano-fabrication/imprinting
    • Wear mechanism of DLC film
  • Chapter 22. Micro- and Nano-fibers by Electrospinning Technology: Processing, Properties, and Applications
    • Introduction
    • Working principle and configuration of electrospinning processing
    • Electrospinning processing parameters—control of the micro- and nano-fiber morphology
    • Electrospinning setups and tools
    • Characteristics and design considerations of electrospun micro- and nano-fibers
    • Applications of electrospun functional micro- and nano-fibers
    • Attempts to increase the production rate of electrospun micro- and nano-fibers
    • Commercial products
    • Technological competitiveness and operation economics
  • Chapter 23. Micro-factories
    • Introduction
    • Characteristics of micro-factories
    • Evolution of micro- and desktop factories
    • Introduction to TUT-micro-factory concept
    • Potential applications for micro-factory solutions
    • Summary and conclusions
  • Chapter 24. Micro-mechanical Assembly
    • Introduction
    • Classification of micro-mechanical assembly methods
    • Systematic approach to micro-mechanical handling and assembly
    • Application example: mechanical assembly of push button parts
    • Conclusion
  • Chapter 25. Self-assembly of Micro-parts
    • Introduction
    • Theory/principle
    • Processes
    • Conclusion
  • Chapter 26. Laser Beam Micro-joining
    • Introduction
    • Laser beam soldering
    • Laser beam micro-welding
    • Conclusions and remarks
  • Chapter 27. Handling for Micro-manufacturing
    • Introduction
    • Serial pick-and-place task
    • Intermachine transport systems
    • Intramachine micro-handling systems
    • Applications
    • Conclusions
  • Chapter 28. Robotics in Micro-manufacturing and Micro-robotics
    • Introduction: Robot definitions
    • Micro-robotics applications
    • Sensors and actuators in micro-robotics
    • Micro-robot examples
    • Conclusions
  • Chapter 29. Measurement, Testing, and Diagnosis for Micro-manufacturing Systems
    • Introduction
    • Precision measurement systems
    • Testing and diagnosis methods
    • Application on micro-devices and machines
    • Conclusions
  • Chapter 30. Optical Coherence Tomography for the Characterization of Micro-parts and Structures
    • Introduction
    • Measurement principles of standard and selected advanced OCT techniques
    • Application of OCT for the evaluation of structures on the micron scale
    • Conclusions and outlook
  • Chapter 31. In situ Testing of Mechanical Properties of Materials
    • Introduction
    • Integrating a mechanical testing setup in an SEM
    • Tensile tests
    • Compression tests
    • Instrumented indentation/nano-indentation
    • Indentation inside the SEM
    • Image analysis
    • Case study: A comparison of in situ micro-tension and micro-compression for studying the plastic properties of nano-crystalline electrodeposited nickel at different length scales
    • Conclusion and outlook
  • Chapter 32. Micro-mechanics Modeling for Micro-forming Processes
    • Introduction
    • CPFE theory
    • Integrated CPFE analysis for the forming of micro-parts
    • Process simulation for the forming of micro-pins
    • Conclusions
  • Chapter 33. Manufacturing Execution Systems for Micro-manufacturing
    • Introduction
    • Production IT overview
    • Exploring the manufacturing operations and control level
    • MES implementation and integration into the production IT
    • Production IT standardization
    • Conclusions
  • Chapter 34. Life Cycle Assessment in Nanotechnology, Materials and Manufacturing
    • Introduction
    • Nano-materials and the environment
    • The principles of LCE
    • Commercial and customized software tools
    • LCA as a methodology for product design guidelines and design for life cycle
    • Energy consumption
    • Relevant industrial case studies
    • LCA for nanotechnology and micro-manufacturing
    • Conclusions
  • Index


Micromanufacturing Engineering and Technology, Second Edition, covers the major topics of micro-manufacturing. The book not only covers theory and manufacturing processes, but it uniquely focuses on a broader range of practical aspects of micro-manufacturing engineering and utilization by also covering materials, tools and equipment, manufacturing system issues, control aspects and case studies. By explaining material selection, design considerations and economic aspects, the book empowers engineers in choosing among competing technologies. With a focus on low-cost and high-volume micro-manufacturing processes, the updated title covers technologies such as micro-mechanical-cutting, laser-machining, micro-forming, micro-EDM, micro-ECM, hot-embossing, micro-injection molding, laser micro-sintering, thin film fabrication, inkjet technology, micro-joining, multiple processes machines, and more. Edited by one of the few world-experts in this relatively new, but rapidly-expanding area and presenting chapters written by a 40-strong team of leading industry specialists, this book is an invaluable source of information for engineers, R&D researchers and academics.

Key Features

  • Covers key micro-manufacturing technologies, processes and equipment with high-volume production capabilities, enabling large companies as well as SMEs to introduce those technologies in production and business and reduce production costs
  • Outlines micro-manufacturing system engineering and practical issues pertaining to material, design, handling, metrology, inspection, testing, sensors, control, system integration and software, and micro-factories
  • Enables manufacturing practitioners to choose the right technology suitable for a particular product-manufacture


Engineers, Academics, Researchers, and Senior students in Mechanical/ Manufacturing/ Materials/ Design Engineering


No. of pages:
© William Andrew 2015
8th May 2015
William Andrew
Hardcover ISBN:
eBook ISBN:


"...a comprehensive view of the most widely used methods for manufacturing high-volume, micro-manufactured products. Engineers involved in micro-manufacturing will continually reference this book." --IEEE Electrical Insulation Magazine

Ratings and Reviews

About the Editor

Yi Qin

He is a Director of the Centre for Micro-Manufacturing, Leader of Knowledge Exchanges of the Department of Design, Manufacture and Engineering Management, at the University of Strathclyde. His main contributions to knowledge in manufacturing, to-date, include new analysis methods for material processing and micro-forming, new forming processes, tool and machine designs, and new manufacturing system concepts. Prof. Qin has published over 170 academic papers/books on various subjects in these fields. He is Editor-in-Chief of the Journal of Manufacturing Review, a Fellow of the Institute of Nanotechnology and Higher Education Academy, Secretary to the Committee of the Consortium of UK University Manufacturing Engineering (COMEH), Member of the European Micro and Nano-Manufacturing Platform. He was a Member of the Scientific Committee of European Scientific Association for Materials Forming from 2006-2012.

Affiliations and Expertise

Professor, Chair of Manufacturing Technology and Systems, The University of Strathclyde, UK