Micro Mechanical Transducers - 1st Edition - ISBN: 9780444505583, 9780080524030

Micro Mechanical Transducers, Volume 8

1st Edition

Pressure Sensors, Accelerometers and Gyroscopes

Editors: S. Middelhoek
Authors: Min-hang Bao
Hardcover ISBN: 9780444505583
eBook ISBN: 9780080524030
Imprint: Elsevier Science
Published Date: 16th October 2000
Page Count: 392
Tax/VAT will be calculated at check-out
355.00
215.00
270.00
325.00
Unavailable
Compatible Not compatible
VitalSource PC, Mac, iPhone & iPad Amazon Kindle eReader
ePub & PDF Apple & PC desktop. Mobile devices (Apple & Android) Amazon Kindle eReader
Mobi Amazon Kindle eReader Anything else

Institutional Access


Table of Contents

Preface. Introduction to micro mechanical transducers. Piezoresistive pressure sensors. Piezoresistive accelerometers. Capacitive sensors. Resonant sensors. Vibratory gyroscopes. Basic principles of micro mechanical transducers. References. Basic mechanics of beam and diaphragm structures. Stress and strain. Stress and strain of beam structures. Vibration frequency by energy method. Vibration frequencies of beam by differential equation method. Damped and forced vibration. Basic mechanics of diaphragms. References. Air damping. Viscous flow of a fluid. Squeeze-film air damping. Slide-film air damping. Damping in rare air. References. Electrostatic driving and capacitive sensing. Electrostatic force. Displacement of elastic structures by electrostatic force. Step and alternating driving. Capacitive sensing. Effects of electric driving on capacitive sensing. References. Piezoresistive sensing. Metal strain gauge. Piezoresistive effect of silicon. Coordinate transformation of tensors of the second rank. Coordinate transformation of piezoresistive coefficient. Piezoresistive sensing elements. Polysilicon piezoresistive sensing elements. Average piezoresistive coefficient. Design of polysilicon piezoresistive sensors. References. Piezoresistive pressure transducers. Designs with flat diaphragms. Pressure transducers with sculptured diaphragm structure. Design of polysilicon pressure transducer. Offset voltage and temperature coefficient of offset. Temperature coefficient of sensitivity. Nonlinearity. Calibration of pressure transducers. References. Piezoresistive accelerometers. Cantilever beam accelerometers. Quad-beam accelerometer. Twin-mass accelerometer. Lateral accelerometers. References. Capacitive pressure transducers and accelerometers. Capacitive pressure transducers. Open loop capacitive accelerometers. Force-balanced accelerometers. Thermo-mechanical noise of mechanical structures. References. Resonant sensors and vibratory gyroscopes. Resonant pressure transducers. Resonant accelerometers. Vibratory gyroscopes. References. Subject Index.

Description

Preface. Introduction to micro mechanical transducers. Piezoresistive pressure sensors. Piezoresistive accelerometers. Capacitive sensors. Resonant sensors. Vibratory gyroscopes. Basic principles of micro mechanical transducers. References. Basic mechanics of beam and diaphragm structures. Stress and strain. Stress and strain of beam structures. Vibration frequency by energy method. Vibration frequencies of beam by differential equation method. Damped and forced vibration. Basic mechanics of diaphragms. References. Air damping. Viscous flow of a fluid. Squeeze-film air damping. Slide-film air damping. Damping in rare air. References. Electrostatic driving and capacitive sensing. Electrostatic force. Displacement of elastic structures by electrostatic force. Step and alternating driving. Capacitive sensing. Effects of electric driving on capacitive sensing. References. Piezoresistive sensing. Metal strain gauge. Piezoresistive effect of silicon. Coordinate transformation of tensors of the second rank. Coordinate transformation of piezoresistive coefficient. Piezoresistive sensing elements. Polysilicon piezoresistive sensing elements. Average piezoresistive coefficient. Design of polysilicon piezoresistive sensors. References. Piezoresistive pressure transducers. Designs with flat diaphragms. Pressure transducers with sculptured diaphragm structure. Design of polysilicon pressure transducer. Offset voltage and temperature coefficient of offset. Temperature coefficient of sensitivity. Nonlinearity. Calibration of pressure transducers. References. Piezoresistive accelerometers. Cantilever beam accelerometers. Quad-beam accelerometer. Twin-mass accelerometer. Lateral accelerometers. References. Capacitive pressure transducers and accelerometers. Capacitive pressure transducers. Open loop capacitive accelerometers. Force-balanced accelerometers. Thermo-mechanical noise of mechanical structures. References. Resonant sensors and vibratory gyroscopes. Resonant pressure transducers. Resonant accelerometers. Vibratory gyroscopes. References. Subject Index.

Readership

Engineers, Researchers, Graduates and Undergraduates in the field of Micro actuators and micro systems.


Details

No. of pages:
392
Language:
English
Copyright:
© Elsevier Science 2000
Published:
Imprint:
Elsevier Science
eBook ISBN:
9780080524030
Hardcover ISBN:
9780444505583

About the Editors

S. Middelhoek Editor

About the Authors

Min-hang Bao Author

Affiliations and Expertise

Fudan University, Shanghai, China