Micro Mechanical Systems - 1st Edition - ISBN: 9780444823632, 9780080536545

Micro Mechanical Systems, Volume 6

1st Edition

Principles and Technology

Editors: T. Fukuda Wolfgang Menz
eBook ISBN: 9780080536545
Hardcover ISBN: 9780444823632
Imprint: Elsevier Science
Published Date: 24th July 1998
Page Count: 276
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Table of Contents

• Introduction

• Photolithographic Microfabrication

• Micromaching by Machine Tools

• Tribological Aspects of Microsystems

• Silicon Microsensors

• Micro-Actuators for Micro-Robots: Electric and Magnetic

• Energy Source and Power Supply Method

• Control Method of Micro Mechanical Systems

• Examples of Microsystems

• Future Problems


In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.


No. of pages:
© Elsevier Science 1998
Elsevier Science
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About the Editors

T. Fukuda Editor

Affiliations and Expertise

Nagoya University, Department of Microsystem Engineering, Furo-cho, Chikusa-ku, Nagoya 464-01, Aichi, Japan

Wolfgang Menz Editor

Affiliations and Expertise

Johann Wolfgang Goethe-Universität, Institut für Sozialforschung Frankfurt, Germany