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Micro Electro-fabrication - 1st Edition - ISBN: 9780128200490, 9780128231807

Micro Electro-fabrication

1st Edition

Editors: Tanveer Saleh Mohamed Sultan Mohamed Ali Kenichi Takahata
Paperback ISBN: 9780128200490
eBook ISBN: 9780128231807
Imprint: Elsevier
Published Date: 14th May 2021
Page Count: 412
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Table of Contents

1. Electro-Spark Process for Microfabrication
2. EDM-based hybrid processes
3. Trends in EDM of Ti and Ni- based Super Alloys: Macro-Micro-Compound Arc/Spark/Melt Process
4. Batch Mode Micro Electro-Discharge Machining
5. Wear compensation in Electro Discharge Machining process using Adaptive Neuro Fuzzy Inference System
6. Surface modification of high-performance alloys through micro-EDM processes
7. Strategies of improving accuracy in micro-EDM
8. Electrical Discharge Machining for formation of Bulk-Shape Memory Alloy Actuators
9. Silicon Micromachining using Electrical Discharge Method
10. Performance Enhancement of Micro Electrical Discharge Machining using Powder Additives Mixed Dielectrics
11. Micro-electrochemical sparks machining: A modern approach for fabrication of micro components from non-conductive materials
12. Electrochemical Discharge machining: Trend and Development
13. Electrochemical machining for micro fabrication


Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy.

This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale.

Key Features

  • Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques
  • Compares a variety of electro-fabrication techniques, outlining which is best in different situations
  • Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM


Materials Scientists and Engineers in academia and R&D


No. of pages:
© Elsevier 2021
14th May 2021
Paperback ISBN:
eBook ISBN:

Ratings and Reviews

About the Editors

Tanveer Saleh

Tanveer Saleh is Associate Professor of Engineering Technology at the International Islamic University Malaysia. He has more than 12 years of teaching and research experience (in Singapore, Canada, and Malaysia) and has taught various courses at undergraduate, postgraduate levels. Dr, Tanveer’s major research area is non-conventional micromachining and manufacturing automation. Dr. Tanveer is also a certified Chartered Engineer under Engineering Council, UK.

Affiliations and Expertise

Associate Professor of Engineering Technology, International Islamic University Malaysia, Malaysia

Mohamed Sultan Mohamed Ali

Mohamed Sultan Mohamed Ali is Associate Professor in the Faculty of Electrical Engineering at Universiti Teknologi Malaysia. Dr. Mohamed Sultan serves as a consultant for Flextronics Malaysia in failure analysis division and is actively involved in many industrial projects. He is a qualified Chartered Engineer (C.Eng.) and Professional Engineer (P.Eng.) by United Kingdom Engineering Council and Board of Engineers Malaysia. His research interests are in the areas of MEMS, nanotechnology, and also in micro/ nanofabrication technologies, including wireless microdevices, integration of microstructures, and microrobotics.

Affiliations and Expertise

Associate Professor, Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Malaysia

Kenichi Takahata

Kenichi Takahata is Associate Professor in the Department of Electrical and Computer Engineering at the University of British Columbia, Canada,, as well as a Research Chair in Advanced Micro/Nanofabrication and MEMS. His research focuses on a broad range of fabrication and packaging in the micro and nano domains and their application to MEMS and other micro/nanomachined devices.

Affiliations and Expertise

Associate Professor, Department of Electrical and Computer Engineering, University of British Columbia, Canada