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Micro and Nano Electro-fabrication - 1st Edition - ISBN: 9780128200490

Micro and Nano Electro-fabrication

1st Edition

Editors: Tanveer Saleh Mohamed Mohamed Ali Kenichi Takahata
Paperback ISBN: 9780128200490
Imprint: Elsevier
Published Date: 1st June 2021
Page Count: 500
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Table of Contents

Section 1: Micro and Nano Electro-Discharge Machining
1. Introduction: Basic principle and Historical Background
2. Modeling and Optimization of micro/nano EDM
3. Application of micro/nano EDM
4. Advanced topics of micro/nano EDM

Section 2: Micro and Nano Electro-Chemical Machining
5. Introduction: Basic principle and Historical Background
6. Modeling and Optimization of micro/nano ECM
7. Application of micro/nano ECM
8. Advanced topics of micro/nano ECM

Section 3: Micro and Nano Localised Electro-Chemical Deposition
9. Introduction: Basic principle and Historical Background
10. Modeling and Optimization of micro/nano (LECDM)
11. Application of micro/nano (LECDM)
12. Advanced topics of micro/nano (LECDM)

Section 4: Conclusion
13. Comparative study of different Electro-fabrication technologies


Micro and Nano Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and electrochemical deposition. Applications covered include the fabrication of nozzles for automobiles, miniature hole machining for aerospace turbine blade cooling, biomedical device fabrication, such as stents, the fabrication of microchannels for microfluidic application, the production of various MEMS devices, rapid prototyping of micro components, and nanoelectrode fabrication for scanning electron microscopy.

This comprehensive book discusses the fundamental nature of the various electro-fabrication processes as well as mathematical modelling and applications. It is an important reference for materials scientists and engineers working at the nanoscale.

Key Features

  • Provides state-of-the-art research investigations on various topics of micro/nano EDM, micro LECD, micro/nano ECM and ECDM techniques
  • Compares a variety of electro-fabrication techniques, outlining which is best in different situations
  • Outlines a variety of modeling and optimization techniques relating to micro/nano EDM, micro LECD, micro/nano ECM and ECDM


Materials Scientists and Engineers in academia and R&D


No. of pages:
© Elsevier 2021
1st June 2021
Paperback ISBN:

Ratings and Reviews

About the Editors

Tanveer Saleh

Tanveer Saleh is Associate Professor of Engineering Technology at the International Islamic University Malaysia. He has more than 12 years of teaching and research experience (in Singapore, Canada, and Malaysia) and has taught various courses at undergraduate, postgraduate levels. Dr, Tanveer’s major research area is non-conventional micromachining and manufacturing automation. Dr. Tanveer is also a certified Chartered Engineer under Engineering Council, UK.

Affiliations and Expertise

Associate Professor of Engineering Technology, International Islamic University Malaysia, Malaysia

Mohamed Mohamed Ali

Mohamed Sultan Mohamed Ali is Associate Professor in the Faculty of Electrical Engineering at Universiti Teknologi Malaysia. Dr. Mohamed Sultan serves as a consultant for Flextronics Malaysia in failure analysis division and is actively involved in many industrial projects. He is a qualified Chartered Engineer (C.Eng.) and Professional Engineer (P.Eng.) by United Kingdom Engineering Council and Board of Engineers Malaysia. His research interests are in the areas of MEMS, nanotechnology, and also in micro/ nanofabrication technologies, including wireless microdevices, integration of microstructures, and microrobotics.

Affiliations and Expertise

Associate Professor, Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Malaysia

Kenichi Takahata

Kenichi Takahata is Associate Professor in the Department of Electrical and Computer Engineering at the University of British Columbia, Canada,, as well as a Research Chair in Advanced Micro/Nanofabrication and MEMS. His research focuses on a broad range of fabrication and packaging in the micro and nano domains and their application to MEMS and other micro/nanomachined devices.

Affiliations and Expertise

Associate Professor, Department of Electrical and Computer Engineering, University of British Columbia, Canada