Metallurgical Coatings 1988

Metallurgical Coatings 1988

Proceedings of the 15th International Conference on Metallurgical Coatings, San Diego, CA, U.S.A., April 11–15, 1988

1st Edition - January 1, 1988

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  • Editor: R Krutenat
  • eBook ISBN: 9780080984858

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Metallurgical coatings 1988 is a compilation of the proceedings of the 15th International Conference on Metallurgical Coatings. This volume is divided into four parts, which deal with synthesis and properties of coatings used in microelectronic applications; methods of characterizing coatings and modified surfaces; protective coatings for magnetic and optical thin film media; and thick and thin film censors. The first part of this volume is further subdivided into five sections focusing on thin film barrier layers, metallization for VLSI circuits, thin films used in packaging technology, new materials and emerging technologies and synthesis and microstructure of high Tc superconductors. The second part is also subdivided into four sections, each presenting different methods, such as the surface and thin film analysis techniques, microstructural characterization techniques, mechanical properties of films and coatings, and non-destructive characterization techniques. Part three discusses the preparation and characterization of reactively sputtered silicon nitride thin films, the bond structures and properties of chemically vapor-deposited amorphous SiC, and the wear of Co-Ni thin film magnetic recording tape against metallic and ceramic surfaces. Finally, this volume explores the insert-mounted thin film sensors for real-time.

Table of Contents

  • Synthesis and Properties of Coatings Used in Microelectronic Applications

    Thin film barrier layers

    Reaction kinetics in tungsten/barrier metal/silicon systems

    Reactively sputtered indium oxide diffusion barrier

    Al3Ti formation by diffusion of aluminum through titanium

    Chemical stability of vanadium boride with aluminum

    Metallization for VLSI circuits

    The deposition mechanisms and microstructures of tungsten films produced by silicon reduction of WF6

    A comparison of the step coverage of aluminum coatings produced by two sputter magnetron systems and a dual-beam ion system

    Reactive-ion-etch-compatible metallization for partially covered contact applications

    Effect of encapsulation on the reaction between palladium and GaAs thin films

    Thin films used in packaging technology

    Process technology for packing applications

    Coatings for strain compliance in plastic packages: opportunities and realities

    Interface interactions relevant to packaging technology

    The reliability of integrated circuits protected with Ti-W/Au bumps

    Focused electron and ion beam repair strategies for wafer-scale interconnections in thin film packaging

    New materials and emerging technologies

    Characterization of HfBx films deposited by r.f. diode and r.f. magnetron sputtering

    Ceramic beams and thin film growth

    Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method

    In0.30Al0.70As /In0.30Ga0.70As quasi-insulating gate strained-layer field effect transistors grown by molecular beam epitaxy

    Synthesis and microstructure of high Tc superconductors

    Thermally sprayed coatings of YBa2Cu306 + x

    Growth and properties of YBa2Cu307 - x superconducting thin films

    Effects of deposition conditions on the superconducting properties of r.f. and d.c. magnetron sputter-deposited YBa2Cu307 - x films

    Methods of Characterizing Coatings and Modified Surfaces

    Surface and thin film analysis techniques

    Analysis of TiN by charged particle beams: nuclear reaction analysis, nuclear reaction broadening and Rutherford backscattering

    An evaluation of four computer modelling programs for Rutherford backscattering spectrometry analysis of oxidized surfaces

    Resonant low energy electrons and their impact on non-destructive depth profiling of thin film samples

    Chemical characterization of the deactivation and protection of FeTi thin films using complementary non-destructive techniques

    Microstructural characterization techniques

    Structural changes induced by heating in electroless nickel-phosphorus alloys

    Plasma spraying o f WO3: structural characterization of the coatings

    Electrical insulating properties of r.f.-sputtered magnesia coatings

    X-ray microfluorescence analyzer for multilayer metal films

    A transmission electron microscopy study on the crystallization of amorphous Ni-P electroless deposited coatings

    Structure and properties of ion sulphocarbonitrided coatings on several structural steels

    Mechanical properties of films and coatings

    Mechanical behavior of aluminum and Al-Cu(2%) thin films

    Microhardness and microstructure of ion-beam-sputtered, nitrogen-doped NiFe films

    Effects of neutral gas incorporation in molybdenum coatings produced by magnetron sputtering

    Non-destructive characterization techniques

    Variable angle spectroscopic ellipsometry: a non-destructive characterization technique for ultrathin and multilayer materials

    Simultaneous determination of dispersion relation and depth profile of thorium fluoride thin film by spectroscopic ellipsometry

    Microscopic bubble formation and collapse at liquid-solid interfaces during electrical powering of thin film structures

    Optical second harmonic generation as a probe of interface composition and structure

    Slow positron annihilation spectroscopy of heterojunctions and homo-junction s of GaAs-based semiconductor thin films

    Protective Coatings for Magnetic and Optical Thin Film Media

    Preparation and characterization of reactively sputtered silicon nitride thin films

    The bond structures and properties of chemically vapour deposited amorphous SiC

    Wear of Co-Ni thin film magnetic recording tape against metallic and ceramic surfaces

    Thick and Thin Film Censors

    Insert-mounted thin film sensors for real-time monitoring of tool conditions

    Author Index

    Subject Index

Product details

  • No. of pages: 412
  • Language: English
  • Copyright: © Elsevier 1988
  • Published: January 1, 1988
  • Imprint: Elsevier
  • eBook ISBN: 9780080984858

About the Editor

R Krutenat

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