Materials Science of Thin Films

3rd Edition

Deposition and Structure

Authors:

  • Milton Ohring
  • Shefford P. Baker
  • Description

    Materials Science of Thin Films: Deposition and Structure, Third Edition, carries on the tradition of this intriguing series, offering the most comprehensive coverage of materials science and technology related to thin films and coatings of any book in the field. The authors' engaging style brings new coverage to a variety of important topics within the field, including the latest, and most important, deposition techniques, atomic layer deposition and high impulse magnetron sputtering, and new, or expanded, coverage of recent developments in thin films technology, such as filtered cathodic arcs, nanorod growth by the vapor-liquid-solid process, carbon nanotubes, new quantitative kinetic nucleation models, atomic-level growth classifications, bi-textured layers, surface morphological evolution models, and competitive grain growth.

    Key Features

    • Provides the most comprehensive coverage of materials science and technology related to thin films and coatings of any book in the field
    • Updated to include coverage of the latest and most important deposition techniques, including atomic layer deposition and high impulse magnetron sputtering
    • Includes new or expanded coverage of recent developments in thin films technology, such as filtered cathodic arcs, nanorod growth by the vapor-liquid-solid process, carbon nanotubes, new quantitative kinetic nucleation models, atomic-level growth classifications, and more
    • Carries on the tradition of this intriguing series, offering the latest information on the subject matter

    Readership

    Advanced undergraduate and first-year graduate students in materials science and electrical engineering; researchers in industrial in-house courses, or short courses offered by professional societies.

    Table of Contents

    A Historical Perspective
    Introduction to Thin Films

    Chapter 1 A Review of Materials Science
    1.1. Introduction
    1.2. Structure
    1.3. Defects in Solids
    1.4. Bonds and Bands in Materials
    1.5. Thermodynamics of Materials
    1.6. Kinetics
    1.7. Nucleation
    1.8. An Introduction to Mechanical Behavior
    1.9. Conclusion
    Chapter 2 Vacuum Science and Technology
    2.1. Introduction
    2.2. Kinetic Theory of Gases
    2.3. Gas Transport and Pumping
    2.4. Vacuum Pumps
    2.5. Vacuum Systems
    2.6. Conclusion
    Chapter 3 Thin-Film Evaporation Processes
    3.1. Introduction
    3.2. The Physics and Chemistry of Evaporation
    3.3. Film Thickness Uniformity and Purity
    3.4. Evaporation Hardware
    3.5. Evaporation Processes and Applications
    3.6. Conclusion
    Chapter 4 Discharges, Plasmas, and Ion-Surface Interactions
    4.1. Introduction
    4.2. Plasmas, Discharges, and Arcs
    4.3. Fundamentals of Plasma Physics
    4.4. Reactions in Plasmas
    4.5. Physics of Sputtering
    4.6. Ion Bombardment Modification of Growing Films
    4.7. Conclusion
    Chapter 5 Plasma and Ion Beam Processing of Thin Films
    5.1. Introduction
    5.2. DC, AC, and Reactive Sputtering Processes
    5.3. Magnetron Sputtering
    5.4. Plasma Etching
    5.5. Hybrid and Modified PVD Processes
    5.6. Conclusion
    Chapter 6 Chemical Vapor Deposition
    6.1. Introduction
    6.2. Reaction Types
    6.3. Thermodynamics of CVD
    6.4. Gas Transport
    6.5. Film Growth Kinetics
    6.6. Thermal CVD Processes
    6.7. Plasma-Enhanced CVD Processes
    6.8. Some CVD Materials Issues
    6.9. Safety
    6.10. Conclusion
    Chapter 7 Substrate Surfaces and Thin-Film Nucleation
    7.1. Introduction
    7.2. An Atomic View of Substrate Surfaces
    7.3. Thermodynamic Aspects of Nucleation
    7.4. Kinetic Processes in Nucleation and Growth
    7.5. Experimental Studies of Nucleation and Growth
    7.6. Conclusion
    Chapter 8 Epitaxy

    Details

    No. of pages:
    864
    Language:
    English
    Copyright:
    © 2030
    Imprint:
    Academic Press
    Print ISBN:
    9780123756664
    Electronic ISBN:
    9780123756671