The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship.
Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following:
Mass transport properties
Interface and junction properties
Defects and properties
* Captures the importance of thin films to microelectronic development
* Examines the cause / effect relationship of structure on thin film properties
An ideal reference for students and researchers in material science, who need to learn the basics of thin films.