Laser Microfabrication

1st Edition

Thin Film Processes and Lithography

Editors: Daniel Ehrlich Jeffrey Tsao
Hardcover ISBN: 9780122334306
eBook ISBN: 9780080918020
Imprint: Academic Press
Published Date: 21st June 1989
Page Count: 587
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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.


Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.

Table of Contents

Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.


No. of pages:
© Academic Press 1989
Academic Press
eBook ISBN:
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About the Editor

Daniel Ehrlich

Affiliations and Expertise

MIT--Lincoln Laboratory

Jeffrey Tsao

Affiliations and Expertise

Sandia National Laboratories


@qu:A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of progress in science and technology....I think that anyone who wants to understand this field of practical laser chemistry should have a copy. It is also useful to study because it raises many new questions about elementary laser-induced reactions on surfaces and thereby stimulates progress in the field. @source:--VLADILEN S. LETOKHOV, PROFESSOR AND HEAD OF DEPARTMENT, INSTITUTE OF SPECTROSCOPY OF USSR ACADEMY OF SCIENCES, TROITZK. IN OPTICS AND PHOTONICS NEWS. @qu:Laser Microfabrication' is an impressive volume detailing the expanding field of laser-assisted patterned chemical processing of surfaces. This volume would be a valuable addition to the library of any researcher in laser-assisted microfabrication. It would also serve as an excellent introduction to the field for those with minimal background in lasers, thin-film processing,, and lithography. @source:--MRS BULLETIN @qu:With contributions from 16 experts in this country and the United Kingdom, this book contains a great wealth of information, covering the wide field of laser microfabrication processes....delightful and informative reading. It should be useful for both starting students and active researchers, as the editors state in the preface. @source:--JOURNAL OF SPIE @qu:This text provides a comprehensive introduction to the field of laser microchemical processing. It is largely tutorial in nature covering everything from optics to chemical reaction kinetics to actual semiconductor processing applications. It contains references to much of the original work and thus not only brings the reader up to date on current research but gives perspective to the field in general. As such, this book should be valuable not only to the newcomer to