Laser Microfabrication

Laser Microfabrication

Thin Film Processes and Lithography

1st Edition - May 28, 1989

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  • Editors: Daniel Ehrlich, Jeffrey Tsao
  • eBook ISBN: 9780080918020

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This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.


Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.

Table of Contents

  • Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.

Product details

  • No. of pages: 587
  • Language: English
  • Copyright: © Academic Press 1989
  • Published: May 28, 1989
  • Imprint: Academic Press
  • eBook ISBN: 9780080918020

About the Editors

Daniel Ehrlich

Affiliations and Expertise

MIT--Lincoln Laboratory

Jeffrey Tsao

Affiliations and Expertise

Sandia National Laboratories

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