Ion Beam Modification of Materials - 1st Edition - ISBN: 9780444823342, 9780444599742

Ion Beam Modification of Materials

1st Edition

Editors: J.S. Williams R.G. Elliman M.C. Ridgway
Hardcover ISBN: 9780444823342
eBook ISBN: 9780444599742
Imprint: North Holland
Published Date: 21st March 1996
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Description

Preface. Sections: I. Basic Processes. II. Low Energy Processes. III. Defect Formation and Annealing of Semiconductors. IV. Semiconductor Processing, Devices and Optical Materials. V. Modification of Non-Semiconductor Materials. VI. Novel Processing: Applications and Techniques.

Table of Contents

Preface. Sections: I. Basic Processes. II. Low Energy Processes. III. Defect Formation and Annealing of Semiconductors. IV. Semiconductor Processing, Devices and Optical Materials. V. Modification of Non-Semiconductor Materials. VI. Novel Processing: Applications and Techniques.

Details

Language:
English
Copyright:
© North Holland 1996
Published:
Imprint:
North Holland
eBook ISBN:
9780444599742

About the Editor

J.S. Williams

R.G. Elliman

M.C. Ridgway

Affiliations and Expertise

The Australian National University, Research School of Physical Sciences and Engineering. GPO Box 4, Canberra ACT 2601, Australia