This volume provides up to date information on the experimental, theoretical and technological aspects of film growth assisted by ion beams.
Ion beam assisted film growth is one of the most effective techniques in aiding the growth of high-quality thin solid films in a controlled way. Moreover, ion beams play a dominant role in the reduction of the growth temperature of thin films of high melting point materials. In this way, ion beams make a considerable and complex contribution to film growth. The volume will be essential reading for scientists, engineers and students working in this field.
- © North Holland 1989
- 1st January 1989
- North Holland
- eBook ISBN:
- Hardcover ISBN:
@qu:...forefront research results are stressed...will be most appropriate to the expert who wishes to know detailed results... @source:Nuclear Instruments and Methods in Physics Research-B @qu:The choice of the authors is excellent and as a result, the book covers all topics in detail with numerous references to the material. @source:Chemtronics