International Progress in Precision Engineering
Proceedings of the 7th International Precision Engineering Seminar, Kobe, Japan, May 1993
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International Progress in Precision Engineering documents the proceedings of the 7th International Precision Engineering Seminar held in Kobe, Japan, May 1993. The seminar brought together the world's leading precision engineering practitioners from areas of application as diverse as sensors, actuators, scanning tip microscopy, micro and nano machining (including bio-machining), ultra precision measuring machines, machine tools, and large optics for space technology. The seminar included 10 oral sessions that dealt with the following topics: (I) Metrology - The Science Base For Precision Engineering; (II) Sensors and Actuators in Precision Engineering and Nanotechnology; (III) New Materials - Applications and Ultra-Precision Energy Beam Processing; (IV) Nanotechnology Machining Processes; (V) New Developments In Ultra-Precision Machines; (VI) Ultra-Precision, Servo, and Control Technology; (VII) Precision Engineering in Space Technology; (VIII) X-Ray Technologies and Their Applications; (IX) Micromechanics and Micrometrology; and (X) New Developments n Precision Engineering. There were also poster sessions and an introductory keynote speech by Dr. H. Mizuno, Executive Vice-President of Matsushita/Panasonic, who talks on the symbiotic relationship between electronics and precision engineering.
Table of Contents
Keynote Address
Precision Engineering and its Impact on the Electronics Industry: Past, Present, and Future Oral Sessions
Session 1: Metrology - The Science Base for Precision Engineering
Limitations of Interpolation Accuracy in Heterodyne Interferometry
A New Ultra-Precision Instrument for Calibration of Gauges and Measurements of High-Quality Products
Correctness of Assessment Software in Coordinate Metrology
Concept for the Traceability of Measurements with Coordinate Measuring Machines
Session 2: Sensors and Actuators in Precision Engineering and Nanotechnology
A Six-Degrees of Freedom Fine Motion Mechanism
Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution
Session 3: New Materials - Applications and Ultra-Precision Energy Beam Processing
Laser Photo-etching Method for Maskless Fabrication of a Through-Hole Contact (THC) Amorphous
Silicon (a-Si) Solar Cell Submodule
Plasma CVM (Chemical Vapor Machining) - A Chemic. Machining Method with Equal Performances to
Conventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions
Broad Ion Beam Processing of Large Surface Areas with Nanometer Precision
Principle of Ion Beam Processing and its Application to Fine and Precision Fabrication
Session 4: Nanotechnology Machining Processes
3-Dimensional Rigid-Plastic FEM Simulation of Chip Formation Process
Tools and Tool Setting for Improved Surface Finish in Diamond Turning
Electrolytic In-process Dressing (ELID) Grinding for Optical Parts Manufacturing
Session 5: New Developments in Ultra-Precision Machines
Development of the Ingersoll Octahedral-Hexapod Machine Tool for Five-Axis Metal Cutting
Development of an Ultraprecision Grinding Equipment for Ductile Mode Surface Finishing of Brittle Materials
Examination and Optimization of Dispersion and Hysteresis of Linear Axis by Machine Tools
Precision Grinding and Slicing of Si-Wafers
Session 6: Ultra-Precision, Servo, and Control Technology
Magnetic Linear Bearing: Theory and Experiment
State Space Trajectory Tracking Control for Fast Nanometer Positioning
Development of Methods for Numerical Error Correction of Machine Tools
The Real-Time Reduction of Electronic Interpolation Errors in Precision Machine Servos
Session 7: Precision Engineering in Space Technology
Development of an X-Ray Telescope in Japan
Active Mirror Support System for SUBARU Telescope
Session 8: X-Ray Technologies and Their Applications
TOMOHAWK - Recent Advances in Computerised X-Ray Tomography Using Real-Time Radiography Equipment
COXI - A Combined Optical and X-Ray Interferometer for High Precision Dimensional Metrology
Session 9: Micromechanics and Micrometrology
The Constant Force Profiler: A Hybrid Instrument for Nanometric Surface Metrology
Development of a Scanning Force Microscope Using a Piezoelectric Cantilever
Miniature Robots for Ultra Precision Measurement and Machining
Session 10: New Developments in Precision Engineering
Bio-Machining of Metals by Bacteria Thiobacillus Ferrooxidans
A Precision Bilaminar Resonating Transducer Assembly Tool
Application of a Nanometric Resolution Optical Tool Setting System to Aspheric Generation
Poster Sessions
Kinematic and Mathematical Research on Three-Point-Method for In-Process Measurement and its Applications in Engineering
Ordinal Space and Evaluation of Geometric Form for Precision Engineering
Research on the Theory and Technique of Omni - Directional Straightness Evaluation
New Method of Geometric-Error Evaluation (GE)
The Development of High Accuracy Turning Multiple Measurement and Control System
Automatic Linear Measuring System for Line Standard and Step Gage
On-Machine Measurement of Form Accuracies Using Two Quadrant Photocells
Self-Calibration of Precision Angle Sensors
Tilt Effects on Optical Angle Measurements
3-Dimensional Coordinate Measurements by Image Digitizing
Development of Efficient Error Calibration System for CMMs Using Calibrated Ring Gauges and Touch Probe
Self-Calibration Method for Three Dimensional Coordinate Measuring Machines Using a Ball Plate
An Exact and Function Independent Bestfit Algorithm, Applicable to Sculptured Surfaces or to Any Non Regular Surface in Parametric Form
An Inspection System for Wire Bond Ball Dimensions
On Line Simultaneous Measurement of Real Contact Area and Approach of Two Nominally Flat Surfaces Under Load
Direct Measurement of Spindle Radial Accuracy by Moiré Topography
The Optimum EST - A New Method for On-Line Measurement of the Straighteness of Precision Machine Tools and Machined Workpiece
Study on a Laser Fiber Alignment System and its Applications
Measurement and Control of Straight Motion Accuracy Using Liquid Surface for Absolute Reference
Direction Stabilized Laser Beam for Straight Datum
3D Topography Representation of Machined Surfaces: A Study on the Integration of Some Characterisation Techniques
Sphericity Noncontact Testing Using Phase-Shifting Interferometry
Measurement of the Absolute Refractive Index of Air by Laser Interferometry
A Micro Bending Device for Tool Materials
Development of an Optical Measuring Method for Radial Spindle Error
A Novel Surface Topography Sensor in the nm Range Based on a Non-Counting Diode Laser Inteferometer
An Active Parallel Leaf Spring Mechanism with a Long Working Range and a High Positioning Resolution
An Etched Glass Master and a Photomask for an Optical Disk Substrate
Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure
A New Low Temperature Fabrication Technology of Ceramic Thin Film Using Ion Beam and its Application
Enlargement of Poly-Si Film Grain Size by a New Excimer Laser Annealing and its Application to High-Performance Poly-Si TFT
On the Origin of Material Induced Vibration in Ultraprecision Machining of Crystalline Materials
Fundamental Study on Energy Dissipation and Tool Shape in Nanoscale Cutting
Study on the Extremely High Compressive Residual Stresses in Machined Layers by Using X-Ray
Computer Simulation on Affected-Layer Generation in Grinding
Observation of Micro-deformation Behavior of Brittle Materials in Indentation Testings at Sub-µm Depth
Analysis of Contact Lens Mirror Finishing by Diamond Turning
Crystallographic Orientation Analysis on Wear Shape of Single Crystal Diamond Cutting Tool
The Influence of Cutting Edge Quality on Workpiece Roughness in Diamond Turning Process
Evaluation of Polished Silicon Wafers' Micro-Roughness by Atomic Force Microscope
Formation of Surface Micro-form Using Magnetic Super-fine Particles
A Study on Nano-surface Polishing of Magnetic Disk Substrate
Characterization of Process Damaged Layers for Optical Fiber Ends
Ductile-Regime Machining of Glassy Carbon
Ultraprecision Ductile Cutting of Brittle Materials by Applying Ultrasonic Vibration
Improvement of Rotary Ultrasonic Deep Hole Drilling of Glass Ceramics - Zerodur
Mechanical Displacement and Removal Mechanisms in Forming and Finishing of Classically Brittle Materials
Truing of Super-Abrasive Wheels for Form-Grinding
Ultra High Speed Grinding of the Glass with a Single Point Diamond
Study on the Optimum Crowning Both for Tooth Profile and Tooth Trace of Spiral Bevel Gear
Characterization of High Precision Parallel Spring Translators
Improvement of Nano-Positioning Toolholder - Compensation of Form Error of the Faceplate
Improvement of Thermal Properties of a Hydrostatic Spindle
An Active Control of an Externally Pressurized Air Thrust Bearing
The Trial Manufacture of High Precision Rotating Spindle
Development of Off-Axis Ellipsoidal Mirrors
Ultra-Precision Machining of Oxygen-Free Copper and Aluminum
Development of Amendable Machining System and Evaluation of its Performance
Perpendicular Guideway Mechanism of Machine Tool - Improvement of Motion Accuracy by Composite Bearing Guideway
Hysteresis Exclude System of Linear Axes of Machine Tools
A Twist-Roller Friction Drive System for Nanometer Positioning
Control of a Traction Drive System
Control of permanent magnets brushless electrical motors. Performances of an Internal Model Control Algorithm
A Micro Grooving System for Ultra Precision Parts
Optimal Controller for the Axis Drift in a Precision Boring Bar with Double-Guide Hydraustatic Bearings
Accuracy Improvement of Machine Tool by New Function of WORFAC
Control of the Dynamical Behaviour of a Machine Tool with Neural Networks for Precision Cutting
Development of 3-Axes Handling Robot Suspended by Active Magnetic Bearings (AMB)
A Discussion on the Dynamics of Gear Noise and the Theory of Vibration
Measurement and Testing in Manufacturing Technologies by Means of Industrial Robots
Para-flex Stage for Wide-Range Scanning Tunneling Microscope
Precise imaging technique for AFM with ZnO Whisker Tip
High Precision Three Dimensional Tip Position Measurement in Scanning Tunnelling Microscopes
Correction of Distorted STM Image by In-Situ Referring Regular Crystalline Lattice
Nanometer Straightness Testing Instrument
Surface Texture Assessment of Magnetic Rigid Disk and Head Slider for Analyzing Their Contact Mechanics in Nanometer Scale
Joint Position Encoding for Micro Robotic Manipulators
Computer Controlled Mask Aligner Using Modified Moire Technique
An Absolute Capacitive Position Transducer for Lithography
Multi-Probe Force Microscope for a Precise Linear Encoder
Evaluation of the Tracking Pre-Groove of the Optical Memory Disk Stamper by Using Fraunhofer Diffraction Method
A Tribo-Memory as an Application of Phase-Transformation of Stainless Steel
Development of Ultraprecision Positioner by Means of Walking Drive
Achievements in Manufacturing Ultra-Precise, Complex Components Using Nano-"Ductile Regime" Grinding
Technical Advances in Process Science Research at the Center for Optics Manufacturing
A Manufacturing Ribosome Model for Biological- Oriented Manufacturing Systems
Product details
- No. of pages: 1091
- Language: English
- Copyright: © Newnes 1993
- Published: May 13, 1993
- Imprint: Newnes
- eBook ISBN: 9780124158986
About the Author
Fumiko Ikawa-Smith
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