International Progress in Precision Engineering

International Progress in Precision Engineering documents the proceedings of the 7th International Precision Engineering Seminar held in Kobe, Japan, May 1993. The seminar brought together the world's leading precision engineering practitioners from areas of application as diverse as sensors, actuators, scanning tip microscopy, micro and nano machining (including bio-machining), ultra precision measuring machines, machine tools, and large optics for space technology. The seminar included 10 oral sessions that dealt with the following topics: (I) Metrology - The Science Base For Precision Engineering; (II) Sensors and Actuators in Precision Engineering and Nanotechnology; (III) New Materials - Applications and Ultra-Precision Energy Beam Processing; (IV) Nanotechnology Machining Processes; (V) New Developments In Ultra-Precision Machines; (VI) Ultra-Precision, Servo, and Control Technology; (VII) Precision Engineering in Space Technology; (VIII) X-Ray Technologies and Their Applications; (IX) Micromechanics and Micrometrology; and (X) New Developments n Precision Engineering. There were also poster sessions and an introductory keynote speech by Dr. H. Mizuno, Executive Vice-President of Matsushita/Panasonic, who talks on the symbiotic relationship between electronics and precision engineering.

Keynote Address

Precision Engineering and its Impact on the Electronics Industry: Past, Present, and Future Oral Sessions

Session 1: Metrology - The Science Base for Precision Engineering

Limitations of Interpolation Accuracy in Heterodyne Interferometry

A New Ultra-Precision Instrument for Calibration of Gauges and Measurements of High-Quality Products

Correctness of Assessment Software in Coordinate Metrology

Concept for the Traceability of Measurements with Coordinate Measuring Machines

Session 2: Sensors and Actuators in Precision Engineering and Nanotechnology

A Six-Degrees of Freedom Fine Motion Mechanism

Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution

Session 3: New Materials - Applications and Ultra-Precision Energy Beam Processing

Laser Photo-etching Method for Maskless Fabrication of a Through-Hole Contact (THC) Amorphous

Silicon (a-Si) Solar Cell Submodule

Plasma CVM (Chemical Vapor Machining) - A Chemic. Machining Method with Equal Performances to

Conventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions

Broad Ion Beam Processing of Large Surface Areas with Nanometer Precision

Principle of Ion Beam Processing and its Application to Fine and Precision Fabrication

Session 4: Nanotechnology Machining Processes

3-Dimensional Rigid-Plastic FEM Simulation of Chip Formation Process

Tools and Tool Setting for Improved Surface Finish in Diamond Turning

Electrolytic In-process Dressing (ELID) Grinding for Optical Parts Manufacturing

Session 5: New Developments in Ultra-Precision Machines

Development of the Ingersoll Octahedral-Hexapod Machine Tool for Five-Axis Metal Cutting

Development of an Ultraprecision Grinding Equipment for Ductile Mode Surface Finishing of Brittle Materials

Examination and Optimization of Dispersion and Hysteresis of Linear Axis by Machine Tools

Precision Grinding and Slicing of Si-Wafers

Session 6: Ultra-Precision, Servo, and Control Technology

Magnetic Linear Bearing: Theory and Experiment

State Space Trajectory Tracking Control for Fast Nanometer Positioning

Development of Methods for Numerical Error Correction of Machine Tools

The Real-Time Reduction of Electronic Interpolation Errors in Precision Machine Servos

Session 7: Precision Engineering in Space Technology

Development of an X-Ray Telescope in Japan

Active Mirror Support System for SUBARU Telescope

Session 8: X-Ray Technologies and Their Applications

TOMOHAWK - Recent Advances in Computerised X-Ray Tomography Using Real-Time Radiography Equipment

COXI - A Combined Optical and X-Ray Interferometer for High Precision Dimensional Metrology

Session 9: Micromechanics and Micrometrology

The Constant Force Profiler: A Hybrid Instrument for Nanometric Surface Metrology

Development of a Scanning Force Microscope Using a Piezoelectric Cantilever

Miniature Robots for Ultra Precision Measurement and Machining

Session 10: New Developments in Precision Engineering

Bio-Machining of Metals by Bacteria Thiobacillus Ferrooxidans

A Precision Bilaminar Resonating Transducer Assembly Tool

Application of a Nanometric Resolution Optical Tool Setting System to Aspheric Generation

Poster Sessions

Kinematic and Mathematical Research on Three-Point-Method for In-Process Measurement and its Applications in Engineering

Ordinal Space and Evaluation of Geometric Form for Precision Engineering

Research on the Theory and Technique of Omni - Directional Straightness Evaluation

New Method of Geometric-Error Evaluation (GE)

The Development of High Accuracy Turning Multiple Measurement and Control System

Automatic Linear Measuring System for Line Standard and Step Gage

On-Machine Measurement of Form Accuracies Using Two Quadrant Photocells

Self-Calibration of Precision Angle Sensors

Tilt Effects on Optical Angle Measurements

3-Dimensional Coordinate Measurements by Image Digitizing

Development of Efficient Error Calibration System for CMMs Using Calibrated Ring Gauges and Touch Probe

Self-Calibration Method for Three Dimensional Coordinate Measuring Machines Using a Ball Plate

An Exact and Function Independent Bestfit Algorithm, Applicable to Sculptured Surfaces or to Any Non Regular Surface in Parametric Form

An Inspection System for Wire Bond Ball Dimensions

On Line Simultaneous Measurement of Real Contact Area and Approach of Two Nominally Flat Surfaces Under Load

Direct Measurement of Spindle Radial Accuracy by Moiré Topography

The Optimum EST - A New Method for On-Line Measurement of the Straighteness of Precision Machine Tools and Machined Workpiece

Study on a Laser Fiber Alignment System and its Applications

Measurement and Control of Straight Motion Accuracy Using Liquid Surface for Absolute Reference

Direction Stabilized Laser Beam for Straight Datum

3D Topography Representation of Machined Surfaces: A Study on the Integration of Some Characterisation Techniques

Sphericity Noncontact Testing Using Phase-Shifting Interferometry

Measurement of the Absolute Refractive Index of Air by Laser Interferometry

A Micro Bending Device for Tool Materials

Development of an Optical Measuring Method for Radial Spindle Error

A Novel Surface Topography Sensor in the nm Range Based on a Non-Counting Diode Laser Inteferometer

An Active Parallel Leaf Spring Mechanism with a Long Working Range and a High Positioning Resolution

An Etched Glass Master and a Photomask for an Optical Disk Substrate

Low Temperature Growth of Polycrystalline Silicon Films by Plasma Chemical Vapor Deposition under Higher Pressure than Atmospheric Pressure

A New Low Temperature Fabrication Technology of Ceramic Thin Film Using Ion Beam and its Application

Enlargement of Poly-Si Film Grain Size by a New Excimer Laser Annealing and its Application to High-Performance Poly-Si TFT

On the Origin of Material Induced Vibration in Ultraprecision Machining of Crystalline Materials

Fundamental Study on Energy Dissipation and Tool Shape in Nanoscale Cutting

Study on the Extremely High Compressive Residual Stresses in Machined Layers by Using X-Ray

Computer Simulation on Affected-Layer Generation in Grinding

Observation of Micro-deformation Behavior of Brittle Materials in Indentation Testings at Sub-µm Depth

Analysis of Contact Lens Mirror Finishing by Diamond Turning

Crystallographic Orientation Analysis on Wear Shape of Single Crystal Diamond Cutting Tool

The Influence of Cutting Edge Quality on Workpiece Roughness in Diamond Turning Process

Evaluation of Polished Silicon Wafers' Micro-Roughness by Atomic Force Microscope

Formation of Surface Micro-form Using Magnetic Super-fine Particles

A Study on Nano-surface Polishing of Magnetic Disk Substrate

Characterization of Process Damaged Layers for Optical Fiber Ends

Ductile-Regime Machining of Glassy Carbon

Ultraprecision Ductile Cutting of Brittle Materials by Applying Ultrasonic Vibration

Improvement of Rotary Ultrasonic Deep Hole Drilling of Glass Ceramics - Zerodur

Mechanical Displacement and Removal Mechanisms in Forming and Finishing of Classically Brittle Materials

Truing of Super-Abrasive Wheels for Form-Grinding

Ultra High Speed Grinding of the Glass with a Single Point Diamond

Study on the Optimum Crowning Both for Tooth Profile and Tooth Trace of Spiral Bevel Gear

Characterization of High Precision Parallel Spring Translators

Improvement of Nano-Positioning Toolholder - Compensation of Form Error of the Faceplate

Improvement of Thermal Properties of a Hydrostatic Spindle

An Active Control of an Externally Pressurized Air Thrust Bearing

The Trial Manufacture of High Precision Rotating Spindle

Development of Off-Axis Ellipsoidal Mirrors

Ultra-Precision Machining of Oxygen-Free Copper and Aluminum

Development of Amendable Machining System and Evaluation of its Performance

Perpendicular Guideway Mechanism of Machine Tool - Improvement of Motion Accuracy by Composite Bearing Guideway

Hysteresis Exclude System of Linear Axes of Machine Tools

A Twist-Roller Friction Drive System for Nanometer Positioning

Control of a Traction Drive System

Control of permanent magnets brushless electrical motors. Performances of an Internal Model Control Algorithm

A Micro Grooving System for Ultra Precision Parts

Optimal Controller for the Axis Drift in a Precision Boring Bar with Double-Guide Hydraustatic Bearings

Accuracy Improvement of Machine Tool by New Function of WORFAC

Control of the Dynamical Behaviour of a Machine Tool with Neural Networks for Precision Cutting

Development of 3-Axes Handling Robot Suspended by Active Magnetic Bearings (AMB)

A Discussion on the Dynamics of Gear Noise and the Theory of Vibration

Measurement and Testing in Manufacturing Technologies by Means of Industrial Robots

Para-flex Stage for Wide-Range Scanning Tunneling Microscope

Precise imaging technique for AFM with ZnO Whisker Tip

High Precision Three Dimensional Tip Position Measurement in Scanning Tunnelling Microscopes

Correction of Distorted STM Image by In-Situ Referring Regular Crystalline Lattice

Nanometer Straightness Testing Instrument

Surface Texture Assessment of Magnetic Rigid Disk and Head Slider for Analyzing Their Contact Mechanics in Nanometer Scale

Joint Position Encoding for Micro Robotic Manipulators

Computer Controlled Mask Aligner Using Modified Moire Technique

An Absolute Capacitive Position Transducer for Lithography

Multi-Probe Force Microscope for a Precise Linear Encoder

Evaluation of the Tracking Pre-Groove of the Optical Memory Disk Stamper by Using Fraunhofer Diffraction Method

A Tribo-Memory as an Application of Phase-Transformation of Stainless Steel

Development of Ultraprecision Positioner by Means of Walking Drive

Achievements in Manufacturing Ultra-Precise, Complex Components Using Nano-"Ductile Regime" Grinding

Technical Advances in Process Science Research at the Center for Optics Manufacturing

A Manufacturing Ribosome Model for Biological- Oriented Manufacturing Systems