Handbook of Thin Film Deposition

3rd Edition

Print ISBN: 9781437778731
eBook ISBN: 9781437778748
Imprint: William Andrew
Published Date: 27th June 2012
Page Count: 408
199.00 + applicable tax
125.00 + applicable tax
213.59 + applicable tax
155.00 + applicable tax
Compatible Not compatible
VitalSource PC, Mac, iPhone & iPad Amazon Kindle eReader
ePub & PDF Apple & PC desktop. Mobile devices (Apple & Android) Amazon Kindle eReader
Mobi Amazon Kindle eReader Anything else

Institutional Access


The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes.  In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films.

Key Features

  • A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications
  • Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries
  • The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics
  • Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM
  • Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry


No. of pages:
© William Andrew 2012
William Andrew
eBook ISBN:
Hardcover ISBN: