Handbook of Thin Film Deposition - 4th Edition - ISBN: 9780128123119

Handbook of Thin Film Deposition

4th Edition

Authors: Krishna Seshan Dominic Schepis
Paperback ISBN: 9780128123119
Imprint: William Andrew
Published Date: 1st January 2018
Page Count: 472
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Handbook of Thin Film Deposition, Fourth Edition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability.

Key Features

  • Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes
  • Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries
  • Features a new chapter discussing Gates Dielectrics
  • Includes a foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry


Students and researchers from semiconductor physics and microelectronic technologies, partly from the field of optical thin films

Table of Contents

Part 1: Scaling
1. A Perspective on Today’s Scaling Challenges and Possible Future Directions
2. Scaling and Its Implications for the Integration and Design of Thin Film and Processes
3. Limits to Scaling and Performance
4. Thermal Conductivity Limit
5. Gates
6. Scaling—Its Effects on Heat Generation and Cooling of Devices. A "Thermal Moore's" Law?

Part 2: Thin Film Deposition, Equipment and Processing
7. Sputter Processing
8. Thin-Film Strain Engineering and Pattern Effects in Dielectrics CVD
9. Equipment and Manufacturability Issues in CVD Processes
10. CMP Method and Practice
11. Process Technology for Copper Interconnects

Part 3. Applications
12. Optical Thin Films
13. Thin Films in Photovoltaics
14. Application of Thin Films in Semiconductor Memories


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© William Andrew 2018
William Andrew
Paperback ISBN:

About the Author

Krishna Seshan

Formerly Assistant Professor in Materials Science at the University of Arizona and has extensive professional experience as a technologist with both the IBM and Intel Corporations.

Affiliations and Expertise

Formerly Assistant Professor, Materials Science, University of Arizona

Dominic Schepis

Currently a principal member of the technical staff and serves on the patent evaluation board at GlobalFoundries Corporation in East Fishkill, NY, working on process development for 14nm CMOS. A graduate from Rensselaer Polytechnic Institute, he joined IBM Microelectronics in 1981 and has worked on a variety of research and development projects including: reactive ion etching, epitaxial film growth, process integration and thin film processing. During his tenure there, he published 25 technical journal papers and has over 100 US patents issued.

Affiliations and Expertise