Handbook of Sputter Deposition Technology

1st Edition

Principles, Technology and Applications

Authors:

  • Shigeru Hayakawa
  • Kiyotaka Wasa
  • Description

    A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

    Readership

    Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.

    Table of Contents

    Thin Film Materials and Devices Thin Film Processes Sputtering Phenomena Sputtering Systems Deposition of Compound Thin Films Microfabrication by Sputtering Future Directions

    Details

    No. of pages:
    316
    Language:
    English
    Copyright:
    © 1992
    Published:
    Imprint:
    William Andrew
    Print ISBN:
    9780815512806
    Electronic ISBN:
    9780815517740

    Reviews

    "àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report