Fundamental Principles of Engineering Nanometrology

2nd Edition

Authors: Richard Leach
Hardcover ISBN: 9781455777532
eBook ISBN: 9781455777501
Imprint: William Andrew
Published Date: 3rd June 2014
Page Count: 384
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Table of Contents

  • Acknowledgements
  • List of Figures
  • List of Tables
  • Chapter 1. Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology

    • 1.1 What is engineering nanometrology?
    • 1.2 The contents of this book and differences to edition 1
    • References
  • Chapter 2. Some Basics of Measurement

    • 2.1 Introduction to measurement
    • 2.2 Units of measurement and the SI
    • 2.3 Length
    • 2.4 Mass
    • 2.5 Force
    • 2.6 Angle
    • 2.7 Traceability
    • 2.8 Accuracy, precision, resolution, error and uncertainty
    • 2.9 The laser
    • References
  • Chapter 3. Precision Measurement Instrumentation – Some Design Principles

    • 3.1 Geometrical considerations
    • 3.2 Kinematic design
    • 3.3 Dynamics
    • 3.4 The Abbe principle
    • 3.5 Elastic compression
    • 3.6 Force loops
    • 3.7 Materials
    • 3.8 Symmetry
    • 3.9 Vibration isolation
    • References
  • Chapter 4. Length Traceability Using Interferometry

    • 4.1 Traceability in length
    • 4.2 Gauge blocks – both a practical and traceable artefact
    • 4.3 Introduction to interferometry
    • 4.4 Interferometer designs
    • 4.5 Measurement of gauge blocks by interferometry
    • References
  • Chapter 5. Displacement Measurement

    • 5.1 Introduction to displacement measurement
    • 5.2 Basic terms
    • 5.3 Displacement interferometry
    • 5.4 Strain sensors
    • 5.5 Capacitive displacement sensors
    • 5.6 Eddy current and inductive displacement sensors
    • 5.7 Optical encoders
    • 5.8 Optical fibre sensors
    • 5.9 Other optical displacement sensors
    • 5.10 Calibration of displacement sensors
    • References
  • Chapter 6. Surface Topography Measurement Instrumentation

    • 6.1 Introduction to surface


Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques.

The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met.

Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology.

Key Features

  • Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research
  • Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty
  • Fully updated to cover the latest technological developments, standards, and regulations


Engineers and scientists involved in micro- and nanomanufacturing and other nanotechnology areas; students and academics in micro- and nanotechnology.


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© William Andrew 2014
William Andrew
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About the Authors

Richard Leach Author

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Affiliations and Expertise

National Physical Laboratory, UK