Table of Contents

  • Acknowledgements
  • List of Figures
  • List of Tables
  • Chapter 1. Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology
    • 1.1 What is engineering nanometrology?
    • 1.2 The contents of this book and differences to edition 1
    • References
  • Chapter 2. Some Basics of Measurement
    • 2.1 Introduction to measurement
    • 2.2 Units of measurement and the SI
    • 2.3 Length
    • 2.4 Mass
    • 2.5 Force
    • 2.6 Angle
    • 2.7 Traceability
    • 2.8 Accuracy, precision, resolution, error and uncertainty
    • 2.9 The laser
    • References
  • Chapter 3. Precision Measurement Instrumentation – Some Design Principles
    • 3.1 Geometrical considerations
    • 3.2 Kinematic design
    • 3.3 Dynamics
    • 3.4 The Abbe principle
    • 3.5 Elastic compression
    • 3.6 Force loops
    • 3.7 Materials
    • 3.8 Symmetry
    • 3.9 Vibration isolation
    • References
  • Chapter 4. Length Traceability Using Interferometry
    • 4.1 Traceability in length
    • 4.2 Gauge blocks – both a practical and traceable artefact
    • 4.3 Introduction to interferometry
    • 4.4 Interferometer designs
    • 4.5 Measurement of gauge blocks by interferometry
    • References
  • Chapter 5. Displacement Measurement
    • 5.1 Introduction to displacement measurement
    • 5.2 Basic terms
    • 5.3 Displacement interferometry
    • 5.4 Strain sensors
    • 5.5 Capacitive displacement sensors
    • 5.6 Eddy current and inductive displacement sensors
    • 5.7 Optical encoders
    • 5.8 Optical fibre sensors
    • 5.9 Other optical displacement sensors
    • 5.10 Calibration of displacement sensors
    • References
  • Chapter 6. Surface Topography Measurement Instrumentation
    • 6.1 Introduction to surface

Details

No. of pages:
384
Language:
English
Copyright:
© 2014
Published:
Imprint:
William Andrew
eBook ISBN:
9781455777501
Print ISBN:
9781455777532
Print ISBN:
9780128101537