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Fabrication and Design of Resonant Microdevices
1st Edition - September 3, 2008
Author: Behraad Bahreyni
Language: English
Hardback ISBN:9780815515777
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eBook ISBN:9780815519713
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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output…Read more
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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.
Offers numerous academic and industrial examples of resonant MEMS
Provides an analytic model of device behaviour
Explains two-port systems in detail
Devotes ample space to excitation and signal detection methods
Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design
MicrofabricationActuation mechanismsSensing techniquesModelingDamping mechanismsInterfacingNoisePackagingSurvey of applications
No. of pages: 250
Language: English
Edition: 1
Published: September 3, 2008
Imprint: William Andrew
Hardback ISBN: 9780815515777
eBook ISBN: 9780815519713
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Behraad Bahreyni
Affiliations and expertise
Cambridge University, UK
Read Fabrication and Design of Resonant Microdevices on ScienceDirect