Diamond Films

Diamond Films

Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth

1st Edition - November 30, 2005

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  • Author: Koji Kobashi
  • eBook ISBN: 9780080525570

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Discusses the most advanced techniques for diamond growthAssists diamond researchers in deciding on the most suitable process conditionsInspires readers to devise new CVD (chemical vapor depositionEver since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.


Professional researchers and graduate students working in the field of diamond films and carbon materials

Table of Contents

  • 1. Overview of Oriented Growth

    2. Diamond - Structure and CVD Growth

    3. Microwave Plasma CVD Reactors

    4. Other CVD Reactors

    5. Crystal Orientations and Film Surface Morphology

    6. Formation of Twins

    7. Homoepitaxial Growth

    8. Surface Reconstruction

    9. Epitaxial Growth on cBN, Ni, and Other Substrates

    10. Diamond Nucleation

    11. HOD Film Growth

    12. Oriented Growth on Noble Metals

    13. Properties and Applications of Heteroepitaxial Diamond Films

    14. Conclusion


    • Notations and units

    • Plasma

    • Properties of diamond and other semiconducting materials

    • Reconstruction of diamond surfaces

    • Materials constants

    • Phase diagrams of carbon and metals

    • Carbon solubilities in metals

    • Biasing and growth conditions for diamond growth

Product details

  • No. of pages: 348
  • Language: English
  • Copyright: © Elsevier Science 2005
  • Published: November 30, 2005
  • Imprint: Elsevier Science
  • eBook ISBN: 9780080525570

About the Author

Koji Kobashi

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