Chemical Mechanical Polishing in Silicon Processing - 1st Edition - ISBN: 9780127521725, 9780080864617

Chemical Mechanical Polishing in Silicon Processing, Volume 63

1st Edition

Serial Editors: R. K. Willardson Eicke Weber
Serial Volume Editors: Shin Hwa Li Robert Miller
eBook ISBN: 9780080864617
Hardcover ISBN: 9780127521725
Imprint: Academic Press
Published Date: 15th October 1999
Page Count: 307
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Description

Since its inception in 1966, the series of numbered volumes known as Semiconductors and Semimetals has distinguished itself through the careful selection of well-known authors, editors, and contributors. The Willardson and Beer series, as it is widely known, has succeeded in producing numerous landmark volumes and chapters. Not only did many of these volumes make an impact at the time of their publication, but they continue to be well-cited years after their original release. Recently, Professor Eicke R. Weber of the University of California at Berkeley joined as a co-editor of the series. Professor Weber, a well-known expert in the field of semiconductor materials, will further contribute to continuing the series' tradition of publishing timely, highly relevant, and long-impacting volumes. Some of the recent volumes, such as Hydrogen in Semiconductors, Imperfections in III/V Materials, Epitaxial Microstructures, High-Speed Heterostructure Devices, Oxygen in Silicon, and others promise that this tradition will be maintained and even expanded. Reflecting the truly interdisciplinary nature of the field that the series covers, the volumes in Semiconductors and Semimetals have been and will continue to be of great interest to physicists, chemists, materials scientists, and device engineers in modern industry.

Readership

Applied physicists, electrical engineers, and materials scientists in both academia and industry.


Details

No. of pages:
307
Language:
English
Copyright:
© Academic Press 2000
Published:
Imprint:
Academic Press
eBook ISBN:
9780080864617
Hardcover ISBN:
9780127521725

Ratings and Reviews


About the Serial Editors

R. K. Willardson Serial Editor

Affiliations and Expertise

WILLARDSON CONSULTING SPOKANE, WASHINGTON

Eicke Weber Serial Editor

Affiliations and Expertise

Fraunhofer-Institut für Solare Energiesysteme ISE, Freiburg, Germany

About the Serial Volume Editors

Shin Hwa Li Serial Volume Editor

Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.

Affiliations and Expertise

SGS-Thompson Microelectronics, Inc., Phoenix, Arizona, U.S.A.

Robert Miller Serial Volume Editor

Robert M. Miller, Ph.D., CCC-SLP, BC-NCD, is chief of Audiology and Speech Pathology at the Veterans' Administration Medical Center, Seattle, Washington. He holds the position of clinical associate professor in the departments of Rehabilitation Medicine; Speech and Hearing Sciences; and Otolaryngology, Head, and Neck Surgery at the University of Washington, Seattle. A nationally recognized expert on management of swallowing disorders, Dr. Miller has authored numerous chapters and articles on the topic. He is co-author of the book Medical Speech Pathology. He is Board Certified by the Academy of Neurologic Communication Disorders and Sciences.

Affiliations and Expertise

Chief of Audiology and Speech Pathology at the Veterans’ Administration Medical Center