Most recent volume

Volume 7. Applications of Piezoelectric Quartz Crystal Microbalances

Published: 1st February 1984 Editors: C. Lu A.W. Czanderna
Applications of Piezoelectric Quartz Crystal Microbalances deals with the theory, design, artifacts, and varied applications of the piezoelectric quartz crystal microbalance. Applications of microbalances range from thin film deposition process control to simultaneous measurement of mass and temperature, analytical chemistry, and space system contamination studies. Stress effects in microbalances are also considered. Comprised of 10 chapters, this volume begins with a historical background and overview of applications of piezoelectric quartz crystal microbalances, followed by an analysis of the theory and practice of microbalances. The role of acoustic impedance in a quartz crystal microbalance and design considerations for a microbalance are given emphasis. Subsequent chapters focus on applications of microbalances in thin film deposition process control; simultaneous measurement of mass and temperature; surface science and analytical chemistry; plasma-assisted etching and space system contamination studies; and aerosol mass measurement. This monograph will be of interest to students and practitioners of physics, chemistry, and materials science.

Additional volumes

Volume 1. Methods of Surface Analysis

Published: 1st January 1984 Editor: A.W. Czanderna

Volume 4. Microweighing in Vacuum and Controlled Environments

Published: 1st January 1980 Editors: A.W. Czanderna S.P. Wolsky

Volume 3. Ultrasound

Published: 1st January 1978 Editor: F.J. Fry