Series: Frontiers of Nanoscience

This series covers frontier research topics across the broad spectrum of the flourishing and interdisciplinary field of Nanoscale Science and Technology. The books are written at a level accessible to post graduate students (PhD and Masters) and final year undergraduates as well as experienced readers seeking to enter or master aspects of the field. Focusing on both the basic science and applications of nanostructures and nanosystems, each book is edited by one or more Volume Editors commissioned by the Series Editor. A key feature of each book in the Series is the tutorial introduction to the topic by the Volume Editors. Topics covered range from nanoscale physics through nanoscale chemistry, nanomaterials, nanoabrication and nanoengineering to nanomanufacturing, nanobiotechnology and nanoenvironmental research.
Book Series: Materials and Processes for Next Generation Lithography

Most recent volume

Volume 11. Materials and Processes for Next Generation Lithography

Published: 18th November 2016 Series Volume Editors: Alex Robinson Richard Lawson

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography.

These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches.

This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication.

Additional volumes

Volume 10. Structure and Properties of Nanoalloys

Published: 5th August 2016 Author: Riccardo Ferrando

Volume 9. Protected Metal Clusters: From Fundamentals to Applications

Published: 1st September 2015 Series Volume Editors: Tatsuya Tsukuda Hannu Häkkinen

Volume 8. Characterization of Nanomaterials in Complex Environmental and Biological Media

Published: 29th May 2015 Series Volume Editors: Mohammed Baalousha Jamie Lead

Volume 7. Nanoscience and the Environment

Published: 28th July 2014 Series Volume Editors: Jamie Lead Eugenia Valsami-Jones

Volume 6. Nanomagnetism: Fundamentals and Applications

Published: 6th June 2014 Series Volume Editor: Chris Binns

Volume 5. Nanomedicine

Published: 1st October 2013 Series Volume Editor: Huw Summers

Volume 4. Nanobiotechnology

Published: 28th June 2012 Series Volume Editors: Jesus M. de la Fuente V. Grazu

Volume 3. Metal Nanoparticles and Nanoalloys

Published: 29th March 2012 Series Volume Editors: Roy Johnston Jess Wilcoxon

Volume 2. Atomic and Molecular Manipulation

Published: 28th July 2011 Series Volume Editors: Andrew Mayne Gérald Dujardin

Volume 1. Nanostructured Materials

Published: 5th December 2008 Editor: Gerhard Wilde