Series: Beam Modification of Materials

Most recent volume


Volume 3. Ion Beam Assisted Film Growth

Published: 1st January 1989 Editors: T. Itoh
This volume provides up to date information on the experimental, theoretical and technological aspects of film growth assisted by ion beams. Ion beam assisted film growth is one of the most effective techniques in aiding the growth of high-quality thin solid films in a controlled way. Moreover, ion beams play a dominant role in the reduction of the growth temperature of thin films of high melting point materials. In this way, ion beams make a considerable and complex contribution to film growth. The volume will be essential reading for scientists, engineers and students working in this field.

Additional volumes


Volume 2. Ion Beam Modification of Insulators

Published: 1st January 1987 Editors: P. Mazzoldi G.W. Arnold

Volume 1. Ion Bombardment Modification of Surfaces

Published: 1st October 1984 Editors: O. Auciello R. Kelly