
Analysis and Design Principles of MEMS Devices
Description
Key Features
* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures
* A problem section is included at the end of each chapter with answers provided at the end of the book.
Readership
Table of Contents
- Chapter 1. Introduction to MEMS devices
1.1. Piezoresistive pressure sensor
1.2. Piezoresistive Accelerometer
1.3. Capacitive Pressure Sensor, Accelerometer and Microphone
1.4. Resonant Sensor and Vibratory Gyroscope
1.5. Micro Mechanical Electric and Optical Switches
1.6. Micro Mechanical Motors
1.7. Micro Electro Mechanical Systems
1.8. Analysis and Design of MEMS Devices
Chapter 2. Basic Mechanics of Beam and Diaphragm Structures
2.1. Stress and Strain
2.2. Stress and Strain of Beam Structures
2.3. Vibration Frequency by Energy Methods
2.4. Vibration Modes and the Buckling of a Beam
2.5. Damped and forced vibration
2.6. Basic Mechanics of Diaphragms
2.7. Problems
Chapter 3. Air Damping
3.1. Drag Effect of a Fluid
3.2. Squeeze-film Air Damping
3.3. Damping of Perforated Thick Plates
3.4. Slide-film Air Damping
3.5. Damping in Rarefied Air
3.6. Problems
Chapter 4. Electrostatic Actuation
4.1. Electrostatic Forces
4.2. Electrostatic Driving of Mechanical Actuator
4.3. Step and Alternative Driving
4.4. Problems
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
5.1. Capacitive Sensing Schemes
5.2. Effects of Electrical Excitation-Static Signal
5.3. Effects of Electrical Excitation-Step Signal
5.4. Effects of Electrical Excitation-Pulse Signal
5.5. Problems
Chapter 6. Piezoresistive Sensing
6.1. Piezoresistive Effect of Silicon
6.2. Coordinate Transformation of Second Rank Tensors
6.3.Coordinate Transformation of Piezoresistive Coefficient
6.4. Piezoresistive Sensing Elements
6.5. Polysilicon Piezoresistive Sensing Elements
6.6. Analyzing Piezoresistive Bridge
6.7. Problems
Product details
- No. of pages: 328
- Language: English
- Copyright: © Elsevier Science 2005
- Published: April 12, 2005
- Imprint: Elsevier Science
- eBook ISBN: 9780080455624
- Hardcover ISBN: 9780444516169
About the Author
Minhang Bao
Affiliations and Expertise
Ratings and Reviews
Latest reviews
(Total rating for all reviews)
NickolaiBelov Sat Jan 18 2020
Analysis and Design Principles of MEMS Devices
Very good book. I bought it to use chapter on squeeze film air damping but read some other sections as well. I like systematic flow of information, coverage of main topics related to mechanics of typical MEMS structures and in-depth analysis of some important cases. MEMS field is very wide. No surprise that some areas important for design of MEMS devices are not covered. In particular, properties of silicon (electrical, thermal, chemical) could be discussed more. This is basic information for MEMS designers. Temperature effects also can be discussed deeper. There is practically no analysis of design for manufacturability - analysis of tolerances related to manufacturing of MEMS structures and their effect on distributions of parameters of MEMS devices - link between process and design.