Table of Contents
- Electron-Beam-Induced Nanometer-Scale Deposition (C.W. Hagen, N. Silvis-Cividjian).
Electron-Beam-Induced Deposition: A Literature Survey.
The Theory of EBID Spatial Resolution.
The Role of Secondary Electrons in EBID.
Delocalization Effects in EBID.
- No. of pages: 264
- Language: English
- Copyright: © Academic Press 2006
- Published: September 7, 2006
- Imprint: Academic Press
- eBook ISBN: 9780080465357
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