Contributors. Preface. R. Albanese and G. Rubinacci, Finite Element Methods for the Solution of 3D Eddy Current Problems: Introduction. Field Equations and Material Properties. Fields, Potentials, and Gauges. Edge Elements for 3D Field Problems. Integral Formulations for Linear and Nonlinear Eddy Currents. Differential Formulations and Constitutive Error Approach. Discussion and Conclusions. Acknowledgments. References. W. Chen and H. Ahmed, Nanofabricationfor Electronics: Introduction. Nanofabrication Methods. Pattern Transfer. Resolution Limit of Organic Resists. Applications of Nanostructures. References. A.D. Feinerman and D.A. Crewe, Miniature Electron Optics: Introduction. Scaling Lawsfor Electrostatic Lenses. Review. Fabrication of Miniature Magnetostatic Lenses. Electron Source. Detector. Electron Optical Calculations. Performance of a Stacked Einzel Lens. Summary and Future Prospects. References. S.A. Nepijko and N.N. Sedov,Aspects of Mirror Electron Microscopy: Introduction. Resolution of Mirror Electron Microscope. Distortion of Details of Object Image Under Observation in Mirror Electron Microscope. Limiting Sensitivity of Mirror Electron Microscope under Observation of Steps on Object. Image of Islands on Object Surfaces in Mirror Electron Microscope. Calculation of Image Contrast in Mirror Electron Microscope in the Focused Operation Mode. Conclusions. Acknowledgment. References. Subject Index.