Advanced CMOS Process Technology

Advanced CMOS Process Technology

1st Edition - March 28, 1989

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  • Author: J Pimbley
  • eBook ISBN: 9780323156806

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Description

Advanced CMOS Process Technology is part of the VLSI Electronics Microstructure Science series. The main topic of this book is complementary metal-oxide semiconductor or CMOS technology, which plays a significant part in the electronics systems. The topics covered in this book range from metallization, isolation techniques, reliability, and yield. The volume begins with an introductory chapter that discusses the microelectronics revolution of the 20th century. Then Chapter 2 puts focus on the CMOS devices and circuit background, discussing CMOS capacitors and field effect transistors. Metallization topics and concepts are covered in Chapter 3, while isolation techniques are tackled in Chapter 4. Long-term reliability of CMOS is the topic covered in Chapter 5. Finally, the ability of semiconductor technology to yield circuits is discussed in Chapter 6. The book is particularly addressed to engineers, scientists, and technical managers.

Table of Contents


  • Preface

    Chapter 1 Introduction

    Chapter 2 CMOS Device and Circuit Background

    I. Junction Diode

    II. Metal-Oxide-Semiconductor Capacitor

    III. Metal-Oxide-Semiconductor Field Effect Transistor

    IV. Circuit Considerations

    V. CMOS Latch-up

    References

    Chapter 3 Metallization

    I. Gate Electrodes

    II. Reduction in Device Parasitics

    III. Interconnections

    IV. An Application of Advanced Metallization Technology

    V. Summary

    References

    Chapter 4 Isolation Techniques

    I. Introduction

    II. Device Isolation

    III. Well Isolation

    IV. Dielectric Isolation

    References

    Chapter 5 Reliability

    I. Channel Hot Electron Degradation

    II. Electromigration

    III. Oxide Wear-out

    References

    Chapter 6 Yield

    I. Yield Basics

    II. Sources and Classification of Yield Loss

    III. Yield Enhancement Methodology

    References

    Index


Product details

  • No. of pages: 304
  • Language: English
  • Copyright: © Academic Press 1989
  • Published: March 28, 1989
  • Imprint: Academic Press
  • eBook ISBN: 9780323156806

About the Author

J Pimbley

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