CHARACTERIZATION OF SEMICONDUCTOR MATERIALS, VOLUME 1, 1
Principles and Methods To order this title, and for more information, click here
By Gary F. McGuire, MCNC, Electronic Technologies Division, Research Triangle Park, NC
Description Characterization of semiconductor materials and methods used to characterize them will be described extensively in this new Noyes series.
Written by experts in each subject area, the series will present the most up-to-date information available in this rapidly advancing
field. Includes chapters on Electrical Characterization, Ion Mass Spectrometry, Photoelectron Spectroscopy, Ion/Solid Interactions and
more.
Audience
Material scientists in the semiconductor and microelectronics fields.
Contents 1. Electrical Characterization of Semiconductor Materials and Devices
Introduction
Four-Point Probe/Wafer Mapping
Defects
Recombination/Generation
Lifetime
Deep Level Transient Spectroscopy
Doping Profiling
References
2. Secondary Ion Mass Spectrometry
Principle of SIMS
Methodology
Mechanism of Secondary Ion Formation
Information Available
Instrumentation
Summary
References
3. Photoelectron
Spectroscopy: Applications to Semiconductors
Introduction
The Electron Photoemission Experiment
Trends in Instrumentation
Profiling
Structures
Conclusion
References
4. Ion/Solid Interaction in Surface Analysis
Introduction
Ion/Solid Interactions: Elemental
Targets
Ion/Solid Interactions: Multielement Targets
Depth Profiling
Summary
References
5. Molecular Characterization of Dielectric
Films by Laser Raman Spectroscopy
Introduction
Theory: Description of the Method
Interpretation of Raman Spectra of Solids
Raman
Instrumentation and Measurement Capability
Applications to Thin Film Characterization
Limitations of Raman Spectroscopy for Thin
Film Characterization
Advanced Raman Characterization Techniques
References
6. Characterization of Semiconductors Surfaces by Appearance
Potential Spectroscopy
Introduction
Principle
Experimental
Applications
Conclusions
Glossary of Symbols
References
Index
Bibliographic details
Hardbound, 342 pages, publication date: DEC-1989
ISBN-13: 978-0-8155-1200-4
ISBN-10: 0-8155-1200-7
Imprint: WILLIAM ANDREW
Price and Ordering
Price: GBP 84.99 USD 140 EUR 99.95
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