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| SEMICONDUCTOR INDUSTRIAL HYGIENE HANDBOOK
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Monitoring, Ventiliation, Equipment and Ergonomics
To order this title, and for more information, click here
By
David G. Baldwin, Apple Computer, Inc.
Paul C. Haber, Hewlett-Packard, USA
Michael E. Williams, Amry Research Laboratory, Monmouth, NY, USA
Description
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and
physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific
to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While
much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor
industry.
Audience
Industrial hygienists and safety engineers in the semiconductor industry
Contents
1. Introduction
1.0 Foreword
2.0 Overview of Book
3.0 Background
References
2. Industrial Hygiene Monitoring
1.0 Overview of
IH Monitoring
2.0 Assessment Tools
3.0 Biomonitoring: Urinary Arsenic Testing
4.0 Chemical Agents
References
3. Industrial Hygiene
Monitoring: Physical Agents
1.0 Noise
2.0 Non-Ionizing Radiation
3.0 Ionizing Radiation
References
4. Ventilation
1.0 Background
2.0 Types
3.0 Monitoring
4.0 Guidelines/Standards
References
5. Personal Protective Equipment (PPE)
1.0 Background
2.0 Chemical
Protective Gloves
3.0 Respiratory Protection
References
6. Indoor Air Quality (IAQ)
1.0 Recognition of IAQ Problems
2.0 Odor
Identification
3.0 Causative Agents
4.0 Evaluation of IAQ Problems
5.0 Generally Recognized Acceptable Levels
6.0 Industrial
Hygiene IAQ Monitoring Equipment
7.0 Prevention of IAQ Problems
8.0 Records
References
7. Ergonomics
1.0 Background
2.0 Identification
and Evaluation of Physical Stressors
3.0 Stressful Postures Associated with CTD'S
4.0 Semiconductor Ergonomic/Material Handling Exposures
5.0 Ergonomic Design and Layout Principles
6.0 Semiconductor Equipment
7.0 Summary
References
8. Industrial Hygiene Recordkeeping
1.0 General
2.0 Continuous Monitor Records
3.0 Ventilation Records
4.0 Employee Communication
5.0 Personnel Records
References
9. Plan Review
1.0 Overview
References
Appendices
Appendix A: Silicon Ingot and Wafer Manufacturing
Appendix B: Silicon Device
Manufacturing Introduction
Appendix C: III-V (GaAs)
Appendix D: III-V Device: Microwave IC
Appendix E: Ion Implanter Maintenance
Safety Considerations
Appendix F: Bibliography
Glossary and Acronyms
Index
| Bibliographic details |
Hardbound, 363 pages, publication date: DEC-1995
ISBN-13: 978-0-8155-1369-8
ISBN-10: 0-8155-1369-0
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
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USD 180
EUR 128.95
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Last update: 30 Nov 2009
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