By
David G. Baldwin, Apple Computer, Inc.
Paul C. Manz, Hewlett-Packard, USA
Michael E. Williams, Amry Research Laboratory, Monmouth, NY, USA
Description
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and
physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific
to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While
much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor
industry.
Audience:
Industrial hygienists and safety engineers in the semiconductor industry
