Safety and Health in the Semiconductor Industry To order this title, and for more information, click here
By Richard A. Bolmen, Aon Risk Services, USA
Description Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and
mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated
circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety
Association (SSA), and the Semiconductor Industry Association (SIA).
The purpose of the Semiconductor Safety Handbook is to provide
a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors
have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken
three years to complete and has involved tremendous effort and commitment by the authors.
They have attempted to construct a reference
manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical
applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically
be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation
of semiconductor employees, the surrounding communities and the environment.
This book is a hands-on reference to environmental, health
and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical
user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation,
maintenance and production in wafer fabrication facilities.
Audience
Semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.
Contents 1. Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies
1.0 Introduction
2.0 Review and Discussion of
Semiconductor Industry Work Injuries and Illnesses
3.0 Review and Discussion of Epidemiologic Investigations
4.0 Conclusion
References
2. Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention
1.0 Introduction
2.0 External and
Internal Sources Affecting Compliance
3.0 Detection of Environmental Compliance and Management Issues
4.0 Corrective Action for Environmental
Compliance and Management Issues
5.0 Mitigation and Prevention of Environmental Compliance and Management Issues
6.0 Adopting Proactive
Environmental Strategies
7.0 Going Beyond Compliance Holistic Considerations
References and Source Materials
Appendix A: Epa Policy
on Environmental Auditing
Appendix B: Environmental Compliance Audit Checklist
3. Chemical Hazards in Semiconductor Operations
Overview
1.0 Photolithography
2.0 Wet Etch
3.0 Dry Etch
4.0 Implant/Diffusion
5.0 Cleaning
6.0 Metallization
7.0 Maintenance Issues
8.0 Use of Gases
4. Industrial Hygiene
1.0 Introduction
2.0 Industrial Hygiene Monitoring
3.0 Personal Protective Equipment
4.0 Odor Identification
5.0 Recordkeeping
Acknowledgments
References
5. Electrical Hazards
1.0 Introduction
2.0 Where Do We
Start?
3.0 Terminology
4.0 Human Effects
5.0 Scenario of an Electrical Shock
6.0 What Really Happens?
7.0 Reporting
8.0 Common
Elements of Electrical Accidents/Accident Investigation
9.0 Electrical Hazard Management
10.0 Typical Electrical Hazards
11.0 Hazard-Based,
Safety Planning
12.0 Lockout/Tagout
13.0 Electrical Safety Cookbook-What Can Be Done? What Can I Do?
References
6. Radiation Safety
1.0 Introduction
2.0 Extremely Low Frequency Electromagnetic Fields (Elf/Emf)
3.0 Radiofrequency/Microwave Radiation
4.0 Lasers
5.0 Ultraviolet Radiation
6.0 Ionizing Radiation
Acknowledgments
References
7. Recognition, Evaluation and Control of Some Plasma
Processing Hazards
Chemical Safety Management In A Nutshell
1.0 Introduction
2.0 Hazard Evaluation
3.0 Process Hazard Review
4.0 Other Mechanisms to Address Equipment Safety Concerns
5.0 Gas Chemical Safety
6.0 Toxicology
7.0 Sources Of Information
References
Additional References
8. Fire Protection Technology for Semiconductor Operations
1.0 Introduction
2.0 Site Selection
3.0 Construction
4.0 Air Handling Systems
5.0 Sprinkler Protection
6.0 Water Supplies
7.0 Supervision
8.0 Chemical Handling
9.0 Equipment
10.0 Human Engineering
9. Building and Fire Codes Impacting the Semiconductor Industry
1.0 Understanding the Need
for Code Compliance
2.0 Overview of Applicable Codes
3.0 Overview of Uniform Building and Fire Codes
4.0 Occupancy Classifications
5.0 Classification of Hazardous Materials
6.0 Allowable Area and Separations
7.0 Location
8.0 Exiting
9.0 Exit Corridors
10.0 Service Corridors
11.0 Hazardous Material Storage and Dispense Rooms
12.0 Mechanical Heating, Ventilating and Air Conditioning
Systems
13.0 Fire Suppression
14.0 Electrical Power Systems
15.0 Life Safety Alarm and Monitoring Systems
16.0 Retrofit and Renovation
of Hazardous Facilities to Comply With ""H"" Codes
17.0 Prioritizing Code Compliance Issues
18.0 Phasing of Project Construction
10. Gases and Gas Equipment
1.0 Introduction
2.0 Gas Distribution Systems in Plant Piping
3.0 Gas Cylinders Safe Use and Handling
4.0 General Gas Handling Equipment
5.0 Cylinder Gas Delivery Systems
6.0 Gas Candidates
Bibliography
11. Toxic Gas Monitoring
1.0 Requirement for Continuous Toxic Gas Monitoring
2.0 Purpose of a Toxic Gas Monitoring System
3.0 Functional Model of a Toxic
Gas Monitoring System
4.0 Selection of a Toxic Gas Monitoring System
5.0 Future Trends
References
Index
Bibliographic details
Hardbound, 634 pages, publication date: DEC-1998
ISBN-13: 978-0-8155-1418-3
ISBN-10: 0-8155-1418-2
Imprint: WILLIAM ANDREW
Price and Ordering
Price: GBP 117.99 USD 195 EUR 138.95
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