ELECTROCHEMISTRY OF SEMICONDUCTORS AND ELECTRONICS
Processes and Devices To order this title, and for more information, click here
By John McHardy Frank Haber
Description This book is an in-depth review of the electrochemistry of semiconductors and electronic devices. For in the relentless pursuit of faster,
more compact devices the limits of materials science are probed, setting ever higher goals for semiconductor purity, crystal uniformity
and circuit density. This book reviews and describes possible electrochemical avenues toward each of these goals.
Audience
Engineers and scientists in the semiconductor and microelectronics industries.
Contents 1. Electrochemical Deposition of Semiconductors
1.0 Introduction
2.0 Theory
3.0 Elemental Semiconductors
4.0 Compound Semiconductors
5.0 Conclusion
6.0 References
2. Chemical Etching: Principles and Applications
1.0 Introduction
2.0 Mechanism of Dissolution
3.0 Mechanism of Selective Etching
4.0 Composition of Etching and Polishing Solutions
5.0 Photoetching
6.0 Electrolytic Etching
and Polishing
7.0 Gas-Phase Chemical Etching
8.0 Morphology of Chemical Etch Pits
9.0 Correspondence Between Etch Figures and Dislocations
10.0 Etching Profiles
11.0 Acknowledgement
12.0 References
3. Electrochemical Passivation of (Hg, Cd)Te
1.0 Introduction
2.0
Anodic Oxidation
3.0 Alternative Passivation Processes
4.0 References
4. Photoelectrochemical Processing of Semiconductors
1.0
Introduction
2.0 Experimental Procedures
3.0 Photoelectrochemical Etching
4.0 Photoelectrochemical Deposition
5.0 Photoelectrochemical
Surface Processing
6.0 Conclusion
7.0 Acknowledgement
8.0 References
5. Photoelectrochemical Characterization
1.0 Introduction
2.0 Direct Response
3.0 Electric Field Modulation of System's Response
4.0 Time Resolved Techniques
5.0 Photothermal Methods
6.0 Topographical Studies
7.0 Acknowledgement
8.0 References
6. Electrochemical Migration
1.0 Introduction
2.0 Model
3.0
Experimental
4.0 Discussion
5.0 Summary
6.0 Acknowledgement
7.0 References
7. Electrochemical Capacitors
1.0 Introduction
2.0 Mechanisms of Charge Storage at the Electro-Chemical Interface
3.0 Dynamic Behavior of Electrochemical Capacitors
4.0 Carbon
Electrochemical Capacitors
5.0 Transition and Noble Metal Oxide Capacitors
6.0 Conducting Polymers
7.0 Conclusions
8.0 Acknowledgements
9.0 References
Index
Bibliographic details
Hardbound, 374 pages, publication date: DEC-1992
ISBN-13: 978-0-8155-1301-8
ISBN-10: 0-8155-1301-1
Imprint: WILLIAM ANDREW
Price and Ordering
Price: GBP 77.99 EUR 91.95 USD 128
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