 |
|
| DEVELOPMENTS IN SURFACE CONTAMINATION AND CLEANING
| |
| | |
|
|
Fundamentals and Applied Aspects
To order this title, and for more information, click here
Edited By
Rajiv Kohli, National Aeronautics and Space Admininstration (NASA), Houston, Texas, U.S.A.
Kashmiri L. Mittal
Description
Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive
to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking,
there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the
ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to
devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are okiller defectso today,
with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and
removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor
the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced
and profusely illustrated.
Audience
Research & development, manufacturing, quality control and procurement specification personnel in many and diversified industries; such
as microelectronics, aerospace, optics, xerography, joining (adhesive bonding), and biomedical. Academia and government will also find
this book an excellent source.
Contents
Introduction
Part 1: Fundamentals
1. The Physical Nature of Very, Very Small Particles and its Impact on their Behavior
Othmar Preining
2. Elucidating the Nature of Very Small Particles
Carlo Altucci and Domenico Paparo
3. Transport and Deposition of Aerosol Particles
Daniel J. Rader and Anthony S. Geller
4. Relevance of Particle Transport in Surface Deposition and Cleaning
Chao-Hsin Lin and Chao
Zhu
5. Tribological Implications of Particles
Koji Kato
6. Airborne Molecular Contamination
Taketoshi Fujimoto, Kikuo Takeda and Tatsuo
Nonaka
7. Engineering Aspects of Particle Adhesion and Removal
David J. Quesnel, Donald S. Rimai and David M. Schaefer
8. ESD Controls
in Cleanroom Environments: Relevance to Particle Deposition
Larry Levit and Arnold Steinman
Part 2: Characterization of Surface Contaminants
9. Electron Microscopy Techniques for Imaging and Analysis of Nanoparticles
Zhong Lin Wang and Jean L. Lee
10. Surface Analysis Methods
for Contaminant Identification
David A. Cole and Lei Zhang
11. Ionic Contamination and Analytical Techniques for Ionic Contamination
Beverly Newton
12. Relevance of Colorimetric Interferometry for Thin Surface Film Contaminants
Michel Querry, Philippe Vergne and Jerome
Molinard
13. Wettability Techniques to Monitor the Cleanliness of Surfaces
William Birch, Alain Carre and Kashmiri L. Mittal
Part 3:
Methods for Removal of Surface Contamination
14. The Use of Surfactants to Enhance Particle Removal from Surfaces
Michael L. Free
15.
Cleaning with Solvents
John B. Durkee
16. Removal of Particles by Chemical Cleaning
Philip G. Clark and Thomas J. Wagener
17. Cleaning
Using High-Speed Impinging Jet
Kuniaki Gotoh
18. Microabrasive Precision Cleaning and Processing Technology
Rajiv Kohli
19. Cleaning
Using Argon/Nitrogen Cryogenic Aerosols
Wayne T. McDermott and Jeffrey W. Butterbaugh
20. Carbon Dioxide Snow Cleaning
Robert Sherman
21. Coatings for Preventing or Deactivation of Biological Contaminants
Joerg C. Tiller
22. Detailed Study of Semiconductor Wafer Drying
Wim Feyn, Frank Hosteyns, Twan Bearda, Sophia Arnauts and Jan Van Steenburgen
| Bibliographic details |
Hardbound, 1200 pages, publication date: DEC-2007
ISBN-13: 978-0-8155-1555-5
ISBN-10: 0-8155-1555-3
Imprint: WILLIAM ANDREW
|
| Price and Ordering |
Price:
USD 310
EUR 221.95
GBP 187.99
|  |
Books and book related electronic products are priced in US dollars (USD), euro (EUR), and Great Britain Pounds (GBP). USD prices apply to the Americas and Asia Pacific. EUR prices apply in Europe and the Middle East. GBP prices apply to the UK and all other countries.
|
See also information about conditions of sale & ordering procedures, and links to our regional sales offices.
|
999/999
Last update: 7 Oct 2009
|
|
| |
| | |
|
|
| |
Home | Elsevier Sites | Privacy Policy | Terms and Conditions | Feedback | Site Map | A Reed Elsevier Company