 |
|
| CHEMICAL VAPOR DEPOSITION
| |
| | |
|
|
Principles and Applications
To order this title, and for more information, click here
Edited By
M. Hitchman, University of Strathclyde
K. Jensen, Massachusetts Institute of Technology
Description
This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition
(CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles
and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles.
Audience
Postgraduates, researchers, and practitioners in the fields of solid state physics and chemistry, microelectronics, materials science, optics, and electronic engineering.
Contents
M.L. Hitchman and K.F. Jensen, Chemical Vapour Deposition--An Overview. K.F. Jensen, Fundamentals of Chemical Vapour Deposition. W.G.
Breiland and P. Ho, Analysis of Chemical Vapor Deposition Processes. M.L. Hitchman and K.F. Jensen, Chemical Vapor Deposition at Low
Pressures. B.S. Meyerson, Silicon Epitaxy by Chemical Vapor Deposition. R.L. Moon and Y.-M. Houng, Organometallic Vapor Phase Epitaxy
of III-V Materials. D.W. Hess and D.B. Graves, Plasma-Assisted Chemical and Vapor Deposition. V.R. McCrary and V.M. Donnelly, Photo-Assisted
Chemical Vapor Deposition. W.B. Jackson, Electronic and Optical Characterization of Chemical Vapor Deposition Films for Device Applications.
G. Wahl, Protective Coatings. Index.
| Bibliographic details |
Hardbound, 677 pages, publication date: JAN-1993
ISBN-13: 978-0-12-349670-6
ISBN-10: 0-12-349670-5
Imprint: ACADEMIC PRESS
|
| Price and Ordering |
Price:
GBP 253
USD 370
EUR 298.95
|  |
Books and book related electronic products are priced in US dollars (USD), euro (EUR), and Great Britain Pounds (GBP). USD prices apply to the Americas and Asia Pacific. EUR prices apply in Europe and the Middle East. GBP prices apply to the UK and all other countries.
|
See also information about conditions of sale & ordering procedures, and links to our regional sales offices.
|
030/302
Last update: 4 Sep 2009
|
|
| |
| | |
|
|
| |
Home | Elsevier Sites | Privacy Policy | Terms and Conditions | Feedback | Site Map | A Reed Elsevier Company