 |
|
| DIAMOND CHEMICAL VAPOR DEPOSITION
| |
| | |
|
|
Nucleation and Early Growth Stages
To order this title, and for more information, click here
By
Huimin Liu, University of California, Irvine, USA
David S. Haber, Colorado State University, CO, USA
Description
This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation
and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD,
and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing
field.
Audience
Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.
Contents
1. General Introduction
2. Atomic and Crystal Structures of Diamond
3. Diamond CVD Techniques
1.0 Hot-Filament CVD
2.0 Plasma-Assisted
CVD
3.0 Flame CVD
4.0 General Characteristics of Diamond CVD Processes
5.0 Summary
4. Diamond Nucleation Mechanisms
1.0 Homogeneous
Nucleation-Gas-Phase Nucleation
2.0 Heterogeneous Nucleation-Surface Nucleation
3.0 Summary
5. Diamond Epitaxy, Oriented Growth,
and Morphology Evolution
1.0 Epitaxy
2.0 Oriented and Textured Growth
3.0 Morphology Evolution
4.0 Summary
6. Effects of Surface
Conditions on Diamond Nucleation
1.0 Substrate Materials
2.0 Surface Pretreatment Methods and Nucleation Enhancement Mechanisms
3.0 Summary
7. Effects of Deposition Conditions on Diamond Nucleation
1.0 Substrate Temperature
2.0 Gas-Phase Activation
3.0 Gas
Pressure and Flow Rate
4.0 Gas Composition
5.0 Oxygen Addition
6.0 Summary
8. Theoretical and Modeling Studies on Diamond Nucleation
1.0 Identification of Nucleation and Growth Mode
2.0 Theoretical Studies on Nucleation Thermodynamics
3.0 Theoretical Modeling
Of Nucleation Kinetics
4.0 Clues of Structure, Chemistry, and Size of Diamond Nuclei
5.0 Summary
References
Index
| Bibliographic details |
Hardbound, 206 pages, publication date: DEC-1996
ISBN-13: 978-0-8155-1380-3
ISBN-10: 0-8155-1380-1
Imprint: WILLIAM ANDREW
|
| Price and Ordering |
Price:
GBP 93.99
EUR 110.95
USD 155
|  |
Books and book related electronic products are priced in US dollars (USD), euro (EUR), and Great Britain Pounds (GBP). USD prices apply to the Americas and Asia Pacific. EUR prices apply in Europe and the Middle East. GBP prices apply to the UK and all other countries.
|
See also information about conditions of sale & ordering procedures, and links to our regional sales offices.
|
999/999
Last update: 3 Oct 2009
|
|
| |
| | |
|
|
| |
Home | Elsevier Sites | Privacy Policy | Terms and Conditions | Feedback | Site Map | A Reed Elsevier Company