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A Practical Guide to Design, Analysis and Applications
To order this title, and for more information, click here
By
Jan Korvink, IMTEK, University of Freiburg, Germany
Oliver Haber, IMTEK, University of Freiburg, Germany
Description
Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives
for osmaller, better, cheaper, and faster?o If you are a product development engineer or manager, the decision to design a MEMS device
implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both
veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting
solutions, technologies and design support tools. You will see how experts from around the world have explored MEMS possibilities and
achieved new breakthrough devices such as RF-MEMS for mobile telecommunications, micro-optics for internet hardware, catheter-based minimal-invasive
operating theatre tools, and in vivo monitoring of exact dosage of medication in ailing patients. This handbook offers a wealth of analytical
techniques treating problematic areas such as alternative designs reliability, packaging, and cost effectiveness.
Audience
Manufacturers and researchers in the following areas: optical and radio frequency switching applications, automotive electronics, computer
peripherals, biomedical equipment, consumer electronics, biotechnology, telecommunications, and military electronics systems.
Contents
1. Introduction
(Jan Korvink)
2. Microtransducer Operation
(Jan Korvink, Oliver Paul)
3. Material Properties: Measurement and Data
(Osamu Tabata, Toshiyuki, Tsuchiya)
4. MEMS and MEMS Simulation
(Jan Korvink, Evgenii B. Rudnyi, Andreas Greiner, and Zhenyu Liu)
5. System-Level Simulation of Microsystems
(Gary Fedder)
6. Thermal Based Sensors
(Friedemann Voelklein)
7. Photon Detectors
(Arokia
Nathan and Karim S. Karim)
8. Free-Space Optical MEMS
(Ming Wu and Pamela R. Patterson)
9. Integrated Micro-Optics
(Hans Zappe)
10.
Magnetic Microsensors
(Chavdar Roumenin)
11. Mechanical Microsensors
(Franz Laermer)
12. Semiconductor-Based Chemical Microsensors
(Henry Baltes, Andreas Hierlemann)
13. Microfluidics
(Roland Zengerle, Jens Ducree)
14. Biomedical Microsystems
(Michael Reed,
Whye-Kei Lye)
15. Microactuators
(Jack Judy)
16. Micromachining Technology
(Patrick French, Pasqualina Sarro)
17. Interface Circuitry
and Microsystems
(Piero Malcovati, Franco Maloberti)
Index
| Bibliographic details |
Hardbound, 990 pages, publication date: NOV-2005
ISBN-13: 978-0-8155-1497-8
ISBN-10: 0-8155-1497-2
Imprint: WILLIAM ANDREW
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| Price and Ordering |
Price:
USD 260
GBP 145
EUR 205
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Books and book related electronic products are priced in US dollars (USD), euro (EUR), and Great Britain Pounds (GBP). USD prices apply to the Americas and Asia Pacific. EUR prices apply in Europe and the Middle East. GBP prices apply to the UK and all other countries.
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Last update: 5 Sep 2009
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