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| ANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES
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By
Minhang Bao, Department of Microelectronics, Fudan University, Shanghai, CHINA
Description
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines.
MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits.
A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature.
This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such
as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical
examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal
advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference
for researchers and engineers in the field.
Audience
Graduate students, researchers and engineers developing new MEMS devices
Contents
Chapter 1. Introduction to MEMS devices
1.1. Piezoresistive pressure sensor
1.2. Piezoresistive Accelerometer
1.3. Capacitive Pressure Sensor, Accelerometer and Microphone
1.4. Resonant Sensor and Vibratory Gyroscope
1.5. Micro
Mechanical Electric and Optical Switches
1.6. Micro Mechanical Motors
1.7. Micro Electro Mechanical Systems
1.8. Analysis
and Design of MEMS Devices
Chapter 2. Basic Mechanics of Beam and Diaphragm Structures
2.1. Stress and Strain
2.2. Stress and Strain of Beam Structures
2.3. Vibration Frequency by Energy Methods
2.4. Vibration Modes and the Buckling
of a Beam
2.5. Damped and forced vibration
2.6. Basic Mechanics of Diaphragms
2.7. Problems
Chapter 3. Air
Damping
3.1. Drag Effect of a Fluid
3.2. Squeeze-film Air Damping
3.3. Damping of Perforated Thick Plates
3.4. Slide-film Air Damping
3.5. Damping in Rarefied Air
3.6. Problems
Chapter 4. Electrostatic Actuation
4.1. Electrostatic Forces
4.2. Electrostatic Driving of Mechanical Actuator
4.3. Step and Alternative Driving
4.4. Problems
Chapter 5. Capacitive Sensing and Effects of Electrical Excitation
5.1. Capacitive Sensing
Schemes
5.2. Effects of Electrical Excitation-Static Signal
5.3. Effects of Electrical Excitation-Step Signal
5.4. Effects
of Electrical Excitation-Pulse Signal
5.5. Problems
Chapter 6. Piezoresistive Sensing
6.1. Piezoresistive
Effect of Silicon
6.2. Coordinate Transformation of Second Rank Tensors
6.3.Coordinate Transformation of Piezoresistive Coefficient
6.4. Piezoresistive Sensing Elements
6.5. Polysilicon Piezoresistive Sensing Elements
6.6. Analyzing Piezoresistive
Bridge
6.7. Problems
| Bibliographic details |
Hardbound, 328 pages, publication date: APR-2005
ISBN-13: 978-0-444-51616-9
ISBN-10: 0-444-51616-6
Imprint: ELSEVIER
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| Price and Ordering |
Price:
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EUR 89.95
USD 117
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Last update: 10 Sep 2009
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