By
Minhang Bao, Department of Microelectronics, Fudan University, Shanghai, CHINA
Description
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines.
MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits.
A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature.
This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such
as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical
examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal
advanced level textbook for graduates,
Analysis and Design Principles of MEMS Devices is a suitable source of reference
for researchers and engineers in the field.
Audience:
Graduate students, researchers and engineers developing new MEMS devices
