Sputtering Materials for VLSI and Thin Film Devices
By- Jaydeep Sarkar, Research Engineer at Praxair Electronics, Connecticut, USA
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications.
Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed.
The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting.Audience
Researchers, engineers, undergraduate and graduate students in the fields of semiconductors, displays, thin films (nanotechnology and MEMS) and related industries.
Hardbound, 512 Pages
Published: September 2013
Imprint: William Andrew
ISBN: 978-0-8155-1593-7
Contents
- Chapter 1: Sputtering materials for microelectronic industry
Chapter 2: Sputter deposition of thin films
Chapter 3: Performance of sputtering targets and productivity
Chapter 4: Sputtering target manufacturing
Chapter 5: Sputtering targets for integrated circuits
Chapter 6: Sputtering targets for displays and photovoltaic devices
Chapter 7: Ferromagnetic sputtering targets for silicide and data storage applications
Chapter 8: Troubleshooting
Appendix I Diffusion and phase transformation
Appendix II Crystallographic texture
Appendix III Phase change materials
Appendix IV Mechanical property evaluation
Appendix V Units and conversion factors
Appendix VI Periodic table
