Silicon-On-Insulator (SOI) Technology book cover

Silicon-On-Insulator (SOI) Technology

Manufacture and Applications

Silicon-On-Insulator (SOI) Technology: Manufacture and Applications covers SOI transistors and circuits, manufacture, and reliability. The book also looks at applications such as memory, power devices, and photonics.

The book is divided into two parts; part one covers SOI materials and manufacture, while part two covers SOI devices and applications. The book begins with chapters that introduce techniques for manufacturing SOI wafer technology, the electrical properties of advanced SOI materials, and modeling short-channel SOI semiconductor transistors. Both partially depleted and fully depleted SOI technologies are considered. Chapters 6 and 7 concern junctionless and fin-on-oxide field effect transistors. The challenges of variability and electrostatic discharge in CMOS devices are also addressed. Part two covers recent and established technologies. These include SOI transistors for radio frequency applications, SOI CMOS circuits for ultralow-power applications, and improving device performance by using 3D integration of SOI integrated circuits. Finally, chapters 13 and 14 consider SOI technology for photonic integrated circuits and for micro-electromechanical systems and nano-electromechanical sensors.

The extensive coverage provided by Silicon-On-Insulator (SOI) Technology makes the book a central resource for those working in the semiconductor industry, for circuit design engineers, and for academics. It is also important for electrical engineers in the automotive and consumer electronics sectors.

Hardbound, 390 Pages

Published: June 2014

Imprint: Woodhead Publishing

ISBN: 978-0-85709-526-8


  • Introduction
    Part I Silicon-on-insulator (SOI) materials and manufacture
    1 Materials and manufacturing techniques for silicon-on-insulator (SOI) wafer technology
    H. Moriceau and F. Fournel, CEA, LETI, France and F. Rieutord, CEA, INAC, France
    2 Characterisation of the electrical properties of advanced silicon-on-insulator (SOI) materials and transistors
    S. Cristoloveanu, IMEP-LAHC, Grenoble, France
    3 Modelling the performance of short-channel fully-depleted silicon-on-insulator metal oxide semiconductor field effect transistors (MOSFETs)
    S. Ghosh, Indian Institute of Technology Kharagpur, India
    4 Partially depleted (PD) silicon-on-insulator (SOI) technology: circuit solutions
    5 Planar Fully depleted (FD) silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) technology
    F. Andrieu, LETI, France
    6 Silicon-on-insulator (SOI) junctionless transistors
    J.P. Colinge, Taiwan Semiconductor Manufacturing Company, Ltd.,Taiwan
    7 Silicon-on-insulator (SOI) fin-on-oxide field effect transistors (FinFETs)
    B. Cheng, University of Glasgow, UK, A. Brown, Gold Standard Simulations Ltd., UK, E. Towie, University of Glasgow, UK, N. Daval, K. K. Bourdelle and B. Y. Nguyen, Soitec, France and A. Asenov, Gold Standard Simulations Ltd., UK
    8 Understanding variability in complementary metal oxide semiconductor (CMOS) devices manufactured using silicon-on-insulator (SOI) technology
    S. Markov, The University of Hong Kong, HK-SAR China, B. Cheng and A. S. M. Zain, University of Glasgow, UK and A. Asenov University of Glasgow and Gold Standard Simulations Ltd., UK
    9 Protecting against electrostatic discharge (ESD) in complementary metal oxide semiconductor (CMOS) integrated circuits (ICs) manufactured using silicon-on-insulator (SOI) technology
    M. G. Khazhinsky, Silicon Laboratories, USA
    Part II Silicon-on-insulator (SOI) devices and applications
    10 Silicon-on-insulator (SOI) metal oxide semiconductor field effect transistors (MOSFETs) for radio frequency (RF) and analogue applications
    J.-P. Raskin, Université catholique de Louvain (UCL), Belgium and M. Emam, Incize, Belgium
    11 Silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) circuits for ultralow-power (ULP) applications
    N. Sugii, Low-power Electronics Association & Project (LEAP), Japan
    12 3D integration of silicon-on-insulator (SOI) integrated circuits (ICs) for improved performance
    C. S. Tan, Nanyang Technological University, Singapore
    13 Silicon-on-insulator (SOI) technology for photonic integrated circuits (PICs)
    W. Bogaerts and S. K. Selvaraja, Ghent Univerity-imec, Belgium.
    14 Silicon-on-insulator (SOI) technology for micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS) sensors
    K. Mori, Institute of Microelectronics, Singapore


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