Silicon Epitaxy, 72 book cover

Silicon Epitaxy, 72

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Published: September 2001

Imprint: Academic Press

ISBN: 978-0-12-752181-7

Contents

  • 1: CVD Technologies for Silicon: A Quick Survey2: Epitaxial Growth Theory: Vapor-Phase Chemistry and Doping3: Epitaxial Growth Facilities, Equipment, and Supplies4: Epitaxial Growth Techniques5: Epitaxial Growth Techniques: Molecular Beam Epitaxy6: Epitaxial Growth Modeling7: Epitaxial Layer Characterization and Metrology8: Epitaxy for Discretes and Power Devices9: Epitaxy on Patterned Wafers10: Si-Based Alloys: SiGe and SiGe:C11: Silicon Epitaxy: New Applications

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